Scalable network electrical devices using ZnO nanowalls

Chul Ho Lee, Yong Jin Kim, Joohyung Lee, Young Joon Hong, Jong Myeong Jeon, Miyoung Kim, Seunghun Hong, Gyu Chul Yi

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

We report the fabrication and electrical characteristics of scalable nanowall network devices and their gas sensor applications. For the network device fabrications, two-dimensional ZnO nanowall networks were grown on AlN/Si substrates with a patterned SiO2 mask layer using selective-area metal-organic vapor-phase epitaxy. The ZnO nanowalls with c-axis orientation were heteroepitaxially grown on AlN/Si substrates, and were single-crystalline, as determined by x-ray diffraction and transmission electron microscopy. The electrical conductivity of the nanowall networks was measured as a function of nanowall dimensions. The conductance increased linearly with the channel width for widths larger than 1 μm, but saturated at 36 μS for widths below 1 μm. This conductance scaling behavior is explained by enhanced conduction through the regions near the edge of the patterned growth areas, where the density of the networks was higher. Gas sensor applications were investigated using the nanowall network devices, and highly sensitive gas detection was demonstrated.

Original languageEnglish
Article number055205
JournalNanotechnology
Volume22
Issue number5
DOIs
Publication statusPublished - 2011 Feb 4
Externally publishedYes

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Lee, C. H., Kim, Y. J., Lee, J., Hong, Y. J., Jeon, J. M., Kim, M., Hong, S., & Yi, G. C. (2011). Scalable network electrical devices using ZnO nanowalls. Nanotechnology, 22(5), [055205]. https://doi.org/10.1088/0957-4484/22/5/055205