Selective placement of single-walled carbon nanotubes on pre-defined micro-patterns on SiO2 surface based on a dry lift-off technique

Thu Hong Tran, Kyong Soo Lee, Jin Woo Lee, Byeong Kwon Ju

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We reported a new technique for self-assembly of selective placement of carbon nanotubes (CNT) on pre- defined micro-patterns. Our work based on the use of a poly-para-xylylene C passivation layer on silicon dioxide (SiO2) surface which was micro-patterned by reactive ion etching (RIE) process and follow by the CNT deposition step. The lift-off of poly-para-xylylene layer then was carried out relying on a dry lift-off method in order to remove the nanotubes adsorbed on the poly-para-xylylene layer leaving the CNT on the desirable areas. CNT located at specific micro-areas with pre-defined patterns from 50 μm down to less than 10 μm line width and variable shapes. This approach provides a simple and useful means allow controlled placement of CNT which is necessary for the large-scale fabrication of electronic devices.

Original languageEnglish
JournalCurrent Applied Physics
Volume9
Issue number1 SUPPL.
DOIs
Publication statusPublished - 2009 Jan 1

Fingerprint

Carbon Nanotubes
Single-walled carbon nanotubes (SWCN)
Carbon nanotubes
carbon nanotubes
Reactive ion etching
Passivation
Silicon Dioxide
Linewidth
Self assembly
Nanotubes
passivity
self assembly
nanotubes
Silica
etching
silicon dioxide
Fabrication
fabrication
electronics
ions

Keywords

  • Deposition
  • Dry lift-off removal
  • Micro-scale patterns
  • Nanomaterial
  • Poly-para-xylylene C

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)

Cite this

Selective placement of single-walled carbon nanotubes on pre-defined micro-patterns on SiO2 surface based on a dry lift-off technique. / Tran, Thu Hong; Lee, Kyong Soo; Lee, Jin Woo; Ju, Byeong Kwon.

In: Current Applied Physics, Vol. 9, No. 1 SUPPL., 01.01.2009.

Research output: Contribution to journalArticle

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