Selective placement of single-walled carbon nanotubes on pre-defined micro-patterns on SiO2 surface based on a dry lift-off technique

Thu Hong Tran, Kyong Soo Lee, Jin Woo Lee, Byeong Kwon Ju

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1 Citation (Scopus)


We reported a new technique for self-assembly of selective placement of carbon nanotubes (CNT) on pre- defined micro-patterns. Our work based on the use of a poly-para-xylylene C passivation layer on silicon dioxide (SiO2) surface which was micro-patterned by reactive ion etching (RIE) process and follow by the CNT deposition step. The lift-off of poly-para-xylylene layer then was carried out relying on a dry lift-off method in order to remove the nanotubes adsorbed on the poly-para-xylylene layer leaving the CNT on the desirable areas. CNT located at specific micro-areas with pre-defined patterns from 50 μm down to less than 10 μm line width and variable shapes. This approach provides a simple and useful means allow controlled placement of CNT which is necessary for the large-scale fabrication of electronic devices.

Original languageEnglish
Pages (from-to)S38-S42
JournalCurrent Applied Physics
Issue number1 SUPPL.
Publication statusPublished - 2009 Jan


  • Deposition
  • Dry lift-off removal
  • Micro-scale patterns
  • Nanomaterial
  • Poly-para-xylylene C

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy(all)


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