Selectively self-assembled single-walled carbon nanotubes using only photolithography without additional chemical process

K. H. Kim, Tae Geun Kim, S. Lee, Y. M. Jhon, S. H. Kim, Y. T. Byun

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

In this paper, we investigated a novel method of selectively assembling single-walled carbon nanotubes (SWCNTs) on a silicon (Si) substrate. These SWCNT arrays were fabricated by using only a photolithographic process. Using this technique, SWCNTs could be absorbed on the Si substrate surface without complicated chemical steps. As a result, we successfully fabricated SWCNT-based multi-channel patterns. The unmanageable SWCNTs could be easily absorbed on the Si0 2 surface. This is to advance one step further from the conventional self-assembled process using octadecyltrichlorosilane (OTS). This technique will provide a useful basis for the implementation of nanostructure-based field emission transistor (FET) devices. This new process can be used to fabricate SWCNT channels of FET devices.

Original languageEnglish
Title of host publicationAIP Conference Proceedings
Pages825-826
Number of pages2
Volume1399
DOIs
Publication statusPublished - 2011 Dec 1
Event30th International Conference on the Physics of Semiconductors, ICPS-30 - Seoul, Korea, Republic of
Duration: 2010 Jul 252010 Jul 30

Other

Other30th International Conference on the Physics of Semiconductors, ICPS-30
CountryKorea, Republic of
CitySeoul
Period10/7/2510/7/30

Fingerprint

photolithography
carbon nanotubes
field emission
transistors
silicon
assembling

Keywords

  • Photolithography
  • SAM
  • SWCNT

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Kim, K. H., Kim, T. G., Lee, S., Jhon, Y. M., Kim, S. H., & Byun, Y. T. (2011). Selectively self-assembled single-walled carbon nanotubes using only photolithography without additional chemical process. In AIP Conference Proceedings (Vol. 1399, pp. 825-826) https://doi.org/10.1063/1.3666631

Selectively self-assembled single-walled carbon nanotubes using only photolithography without additional chemical process. / Kim, K. H.; Kim, Tae Geun; Lee, S.; Jhon, Y. M.; Kim, S. H.; Byun, Y. T.

AIP Conference Proceedings. Vol. 1399 2011. p. 825-826.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, KH, Kim, TG, Lee, S, Jhon, YM, Kim, SH & Byun, YT 2011, Selectively self-assembled single-walled carbon nanotubes using only photolithography without additional chemical process. in AIP Conference Proceedings. vol. 1399, pp. 825-826, 30th International Conference on the Physics of Semiconductors, ICPS-30, Seoul, Korea, Republic of, 10/7/25. https://doi.org/10.1063/1.3666631
Kim, K. H. ; Kim, Tae Geun ; Lee, S. ; Jhon, Y. M. ; Kim, S. H. ; Byun, Y. T. / Selectively self-assembled single-walled carbon nanotubes using only photolithography without additional chemical process. AIP Conference Proceedings. Vol. 1399 2011. pp. 825-826
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