Self-constrained sintering of Al2O3/glass/Al 2O3 ceramics by glass infiltration

Jung Hun You, Dong Hun Yeo, Hyo Soon Shin, Jong Hee Kim, Ho Gyu Yoon

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Though need for precise alignment of interlayer patterning in LTCC application, there have been few reports about zero-shrinkage sintering techniques. In this study, ceramic substrate with minimal x-y shrinkage was prepared by glass infiltration method with 'Al2O3/glass/ Al2O3' structure. Glass infiltration into alumina particle layer was observed with variation of both sintering temperature (700≤T sint.≤900 °C) and alumina particle size distribution (0.5≤D50≤1.8 μm). Since glass had low viscosity enough to infiltrate at 700 °C, infiltration started at that temperature and infiltrated up to 20 μm or so with temperature increase, but infiltration depth did not increase noticeably above 750 °C. Based on these results, when sintered at 900 °C with controlled sheet thickness of both glass and alumina, the shrinkage in x-y direction was calculated as less than 0.2%, with 40% in z direction. Dielectric constant (εr) measured 6.19 with quality factor (Q) of 552 at 1 GHz of frequency. From these results, it is thought that zero-shrinkage ceramic substrates would be obtained without de-lamination.

Original languageEnglish
Pages (from-to)367-371
Number of pages5
JournalJournal of Electroceramics
Volume23
Issue number2-4
DOIs
Publication statusPublished - 2009 Oct

Keywords

  • AlO/glass/Al O structure
  • Infiltration
  • LTCC
  • Zero shrinkage

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Condensed Matter Physics
  • Mechanics of Materials
  • Electrical and Electronic Engineering
  • Materials Chemistry

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