Self-constrained sintering of Al2O3/glass/Al 2O3 ceramics by glass infiltration

Jung Hun You, Dong Hun Yeo, Hyo Soon Shin, Jong Hee Kim, Ho Gyu Yoon

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Though need for precise alignment of interlayer patterning in LTCC application, there have been few reports about zero-shrinkage sintering techniques. In this study, ceramic substrate with minimal x-y shrinkage was prepared by glass infiltration method with 'Al2O3/glass/ Al2O3' structure. Glass infiltration into alumina particle layer was observed with variation of both sintering temperature (700≤T sint.≤900 °C) and alumina particle size distribution (0.5≤D50≤1.8 μm). Since glass had low viscosity enough to infiltrate at 700 °C, infiltration started at that temperature and infiltrated up to 20 μm or so with temperature increase, but infiltration depth did not increase noticeably above 750 °C. Based on these results, when sintered at 900 °C with controlled sheet thickness of both glass and alumina, the shrinkage in x-y direction was calculated as less than 0.2%, with 40% in z direction. Dielectric constant (εr) measured 6.19 with quality factor (Q) of 552 at 1 GHz of frequency. From these results, it is thought that zero-shrinkage ceramic substrates would be obtained without de-lamination.

Original languageEnglish
Pages (from-to)367-371
Number of pages5
JournalJournal of Electroceramics
Volume23
Issue number2-4
DOIs
Publication statusPublished - 2009 Oct 1

Fingerprint

infiltration
Infiltration
sintering
Sintering
shrinkage
ceramics
Aluminum Oxide
Glass
glass
Alumina
aluminum oxides
Substrates
particle size distribution
Particle size analysis
Temperature
laminates
temperature
Q factors
interlayers
Permittivity

Keywords

  • AlO/glass/Al O structure
  • Infiltration
  • LTCC
  • Zero shrinkage

ASJC Scopus subject areas

  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Mechanics of Materials

Cite this

Self-constrained sintering of Al2O3/glass/Al 2O3 ceramics by glass infiltration. / You, Jung Hun; Yeo, Dong Hun; Shin, Hyo Soon; Kim, Jong Hee; Yoon, Ho Gyu.

In: Journal of Electroceramics, Vol. 23, No. 2-4, 01.10.2009, p. 367-371.

Research output: Contribution to journalArticle

You, Jung Hun ; Yeo, Dong Hun ; Shin, Hyo Soon ; Kim, Jong Hee ; Yoon, Ho Gyu. / Self-constrained sintering of Al2O3/glass/Al 2O3 ceramics by glass infiltration. In: Journal of Electroceramics. 2009 ; Vol. 23, No. 2-4. pp. 367-371.
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