Abstract
In this work, we fabricated tip-shaped Si reflector arrays which are conventionally studied for the electron emitter in FED field and report preliminary results of light emission observed by TFEL structure with the Si reflector. As a result, 3600 reflectors was formed within one pixel and these picture elements create a well concentrated visible light around the point reflectors under the bipolar pulse excitation.
Original language | English |
---|---|
Pages | 371-375 |
Number of pages | 5 |
Publication status | Published - 1999 |
Event | Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA Duration: 1999 Jan 17 → 1999 Jan 21 |
Other
Other | Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS |
---|---|
City | Orlando, FL, USA |
Period | 99/1/17 → 99/1/21 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering