Self-powered flexible touch sensors based on PZT thin films using laser lift-off

Myoung Sub Noh, Sangtae Kim, Do Kyung Hwang, Chong-Yun Kang

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Touch screens have become an inherent part of the user interface in many electronics applications such as smartphones. The two types of developed touch sensors, the resistive and capacitive sensing devices, may face several difficulties when applied to flexible device applications such as touch signals arising from bending motions. In this study, we assess the feasibility of flexible touch sensors based on piezoelectric PbZr0.52Ti0.48O3 (PZT) thin films. Piezoelectric ceramic based flexible touch sensors possess unique advantages including scalable fabrication, fast response time, durability, and being self-powered. A demonstration device has been fabricated with a sandwich structure consisting of Pt electrode/functional PZT/Pt electrode/flexible substrate structure using laser lift-off (LLO) method. In order to anneal the functional PZT layer at high temperature (600 °C), the device was first fabricated on the sapphire substrate and transferred via melting sacrificial PZT layer with an excimer laser. We demonstrate the detection of x- and y-axis touch location via piezoelectric materials and confirm that the flexible piezoelectric touch sensors can distinguish between touch-induced and bending-induced signals via signal location, signal shape, and duration time. A notable feature of this fabrication technique involves its possibility to be fabricated in high resolution. This device may potentially achieve high resolution with suitable fabrication techniques, thus, providing the possibility for the next generation touch sensors.

Original languageEnglish
Pages (from-to)288-294
Number of pages7
JournalSensors and Actuators, A: Physical
Volume261
DOIs
Publication statusPublished - 2017 Jul 1

Fingerprint

touch
Thin films
Lasers
sensors
Sensors
thin films
lasers
Fabrication
Electrodes
Touch screens
Sandwich structures
Piezoelectric ceramics
Aluminum Oxide
Piezoelectric materials
fabrication
Smartphones
Excimer lasers
Substrates
Sapphire
User interfaces

Keywords

  • Flexible piezoelectric touch sensors
  • Laser lift-off (LLO)
  • PZT

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Self-powered flexible touch sensors based on PZT thin films using laser lift-off. / Noh, Myoung Sub; Kim, Sangtae; Hwang, Do Kyung; Kang, Chong-Yun.

In: Sensors and Actuators, A: Physical, Vol. 261, 01.07.2017, p. 288-294.

Research output: Contribution to journalArticle

Noh, Myoung Sub ; Kim, Sangtae ; Hwang, Do Kyung ; Kang, Chong-Yun. / Self-powered flexible touch sensors based on PZT thin films using laser lift-off. In: Sensors and Actuators, A: Physical. 2017 ; Vol. 261. pp. 288-294.
@article{b3b391a3d57241c3ae7a73707feda1e1,
title = "Self-powered flexible touch sensors based on PZT thin films using laser lift-off",
abstract = "Touch screens have become an inherent part of the user interface in many electronics applications such as smartphones. The two types of developed touch sensors, the resistive and capacitive sensing devices, may face several difficulties when applied to flexible device applications such as touch signals arising from bending motions. In this study, we assess the feasibility of flexible touch sensors based on piezoelectric PbZr0.52Ti0.48O3 (PZT) thin films. Piezoelectric ceramic based flexible touch sensors possess unique advantages including scalable fabrication, fast response time, durability, and being self-powered. A demonstration device has been fabricated with a sandwich structure consisting of Pt electrode/functional PZT/Pt electrode/flexible substrate structure using laser lift-off (LLO) method. In order to anneal the functional PZT layer at high temperature (600 °C), the device was first fabricated on the sapphire substrate and transferred via melting sacrificial PZT layer with an excimer laser. We demonstrate the detection of x- and y-axis touch location via piezoelectric materials and confirm that the flexible piezoelectric touch sensors can distinguish between touch-induced and bending-induced signals via signal location, signal shape, and duration time. A notable feature of this fabrication technique involves its possibility to be fabricated in high resolution. This device may potentially achieve high resolution with suitable fabrication techniques, thus, providing the possibility for the next generation touch sensors.",
keywords = "Flexible piezoelectric touch sensors, Laser lift-off (LLO), PZT",
author = "Noh, {Myoung Sub} and Sangtae Kim and Hwang, {Do Kyung} and Chong-Yun Kang",
year = "2017",
month = "7",
day = "1",
doi = "10.1016/j.sna.2017.04.046",
language = "English",
volume = "261",
pages = "288--294",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",

}

TY - JOUR

T1 - Self-powered flexible touch sensors based on PZT thin films using laser lift-off

AU - Noh, Myoung Sub

AU - Kim, Sangtae

AU - Hwang, Do Kyung

AU - Kang, Chong-Yun

PY - 2017/7/1

Y1 - 2017/7/1

N2 - Touch screens have become an inherent part of the user interface in many electronics applications such as smartphones. The two types of developed touch sensors, the resistive and capacitive sensing devices, may face several difficulties when applied to flexible device applications such as touch signals arising from bending motions. In this study, we assess the feasibility of flexible touch sensors based on piezoelectric PbZr0.52Ti0.48O3 (PZT) thin films. Piezoelectric ceramic based flexible touch sensors possess unique advantages including scalable fabrication, fast response time, durability, and being self-powered. A demonstration device has been fabricated with a sandwich structure consisting of Pt electrode/functional PZT/Pt electrode/flexible substrate structure using laser lift-off (LLO) method. In order to anneal the functional PZT layer at high temperature (600 °C), the device was first fabricated on the sapphire substrate and transferred via melting sacrificial PZT layer with an excimer laser. We demonstrate the detection of x- and y-axis touch location via piezoelectric materials and confirm that the flexible piezoelectric touch sensors can distinguish between touch-induced and bending-induced signals via signal location, signal shape, and duration time. A notable feature of this fabrication technique involves its possibility to be fabricated in high resolution. This device may potentially achieve high resolution with suitable fabrication techniques, thus, providing the possibility for the next generation touch sensors.

AB - Touch screens have become an inherent part of the user interface in many electronics applications such as smartphones. The two types of developed touch sensors, the resistive and capacitive sensing devices, may face several difficulties when applied to flexible device applications such as touch signals arising from bending motions. In this study, we assess the feasibility of flexible touch sensors based on piezoelectric PbZr0.52Ti0.48O3 (PZT) thin films. Piezoelectric ceramic based flexible touch sensors possess unique advantages including scalable fabrication, fast response time, durability, and being self-powered. A demonstration device has been fabricated with a sandwich structure consisting of Pt electrode/functional PZT/Pt electrode/flexible substrate structure using laser lift-off (LLO) method. In order to anneal the functional PZT layer at high temperature (600 °C), the device was first fabricated on the sapphire substrate and transferred via melting sacrificial PZT layer with an excimer laser. We demonstrate the detection of x- and y-axis touch location via piezoelectric materials and confirm that the flexible piezoelectric touch sensors can distinguish between touch-induced and bending-induced signals via signal location, signal shape, and duration time. A notable feature of this fabrication technique involves its possibility to be fabricated in high resolution. This device may potentially achieve high resolution with suitable fabrication techniques, thus, providing the possibility for the next generation touch sensors.

KW - Flexible piezoelectric touch sensors

KW - Laser lift-off (LLO)

KW - PZT

UR - http://www.scopus.com/inward/record.url?scp=85019080822&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85019080822&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2017.04.046

DO - 10.1016/j.sna.2017.04.046

M3 - Article

AN - SCOPUS:85019080822

VL - 261

SP - 288

EP - 294

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

ER -