SEM and Auger studies of a PLZT thin film

Kwangsoo No, Dae Sung Yoon, Jae Myung Kim

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The microstructure and the composition profile of lead lanthanum zirconate titanate thin film fabricated using the sol-gel method were analyzed using the scanning electron microscope and scanning Auger microscope. The PLZT thin film consists of micron-scale spheroidal perovskite grains and nano-scale pyrochlore grains. The perovskite grain has a higher lead and lower oxygen and zirconium contents than the pyrochlore grain. The Auger spectra of the two phases were similar except for energy shift and extra fine structure of oxygen peaks. The Auger depth profile and SEM observation of the cross-sectional fracture surface showed higher perovskite content near the interface between PLZT and ITO films than the surface of the PLZT film.

Original languageEnglish
Pages (from-to)245-248
Number of pages4
JournalJournal of Materials Research
Volume8
Issue number2
DOIs
Publication statusPublished - 1993 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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