Shear-Rolling Process for Unidirectionally and Perpendicularly Oriented Sub-10-nm Block Copolymer Patterns on the 4 in Scale

Jinwoo Oh, Minkyung Shin, In Soo Kim, Hyo Seon Suh, Yongjoo Kim, Jai Kyeong Kim, Joona Bang, Bongjun Yeom, Jeong Gon Son

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Shear alignment of the block copolymer (BCP) thin film is one of the promising directed self-Assembly (DSA) methodologies for the unidirectional alignment of sub-10 nm microdomains of BCPs for next-generation nanolithography and nanowire-grid polarizers. However, because of the differences in the surface/interfacial energies at the top surface/bottom interface, the shear-induced ordering of BCP nanopatterns has been restricted to BCPs with spherical and cylindrical nanopatterns and cannot be realized for high-Aspect-ratio perpendicular lamellar structures, which is essential for practical application to semiconductor pattern processes. It is still a difficult challenge to fabricate the unidirectional alignment in a short time over a large area. In this study, we propose an approach for combining the shear-rolling process with the filtered plasma treatment of BCP films for the fabrication of unidirectionally aligned and perpendicularly oriented lamellar nanostructures. This approach enables fabrication within 1 min on a 4 in scale. We treated filtered plasma on the BCP film for perpendicular orientation and executed the hot-rolling process with different roller and stage speeds. Large-scale shear was generated only at the location where the BCP film was in contact with both the roller and stage, effectively applying shear stress to a large area of the BCP film within a short time. The repeated application of this shear-rolling process can achieve a higher level of unidirectional alignment. Our aligned BCP vertical lamellae were used to fabricate a high-Aspect-ratio sub-10-nm-wide metallic nanowire array via dry/wet processes. In addition, shear-rolling with chemoepitaxy patterns can achieve higher orientational order and lower defectivity.

Original languageEnglish
Pages (from-to)8549-8558
Number of pages10
JournalACS nano
Volume15
Issue number5
DOIs
Publication statusPublished - 2021 May 25

Keywords

  • block copolymer
  • directed self-Assembly
  • directional alignment
  • filtered plasma
  • perpendicular orientation
  • shear-rolling
  • sub-10 nm patterning

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint

Dive into the research topics of 'Shear-Rolling Process for Unidirectionally and Perpendicularly Oriented Sub-10-nm Block Copolymer Patterns on the 4 in Scale'. Together they form a unique fingerprint.

Cite this