Si-nanowire-array-based NOT-logic circuits constructed on plastic substrates using top-down methods

Youngin Jeon, Jeongmin Kang, Myeongwon Lee, Taeho Moon, Sangsig Kim

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1 Citation (Scopus)

Abstract

Si-nanowire (NW)-array-based NOT-logic circuits were constructed on plastic substrates. The Si-NW arrays were fabricated on a Si wafer through top-down methods, including conventional photolithography and crystallographic wet etching, and transferred onto the plastic substrates. Two field-effect transistors were fabricated on a single Si-NW array composed of five nanowires aligned in parallel and connected in series to form NOT-logic circuits. The excellent flexibility of the fabricated device was confirmed by bending-cycling tests. The voltage-transfer curve of the NOT-logic circuits showed an inverting operation with a logic swing of ~92% and voltage gain of ~2.5.

Original languageEnglish
Pages (from-to)3350-3353
Number of pages4
JournalJournal of Nanoscience and Nanotechnology
Volume13
Issue number5
DOIs
Publication statusPublished - 2013 May 1

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Keywords

  • Field-effect transistor
  • NOT-logic circuit
  • Plastic substrate
  • Silicon-nanowire array
  • Top-down approach

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

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