Silicon based micro-scale metal grid for field emission device

Jaehong Kim, Jung Il Kim, Geun Ju Kim, Duchang Heo, Seok Gy Jeon, Dong Hoon Shin, Yuning Sun, Cheol Jin Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

For application to electron field emission devices, a metal grid based on a silicon frame is introduced. Silicon frame is used to improve the thermal resistivity and electrical stability by electron beam. Silicon based micro-scale metal grid fabricated using MEMS technology.

Original languageEnglish
Title of host publicationTechnical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012
Pages278-279
Number of pages2
DOIs
Publication statusPublished - 2012 Nov 19
Event25th International Vacuum Nanoelectronics Conference, IVNC 2012 - Jeju, Korea, Republic of
Duration: 2012 Jul 92012 Jul 13

Other

Other25th International Vacuum Nanoelectronics Conference, IVNC 2012
CountryKorea, Republic of
CityJeju
Period12/7/912/7/13

Fingerprint

Field emission
Silicon
Metals
MEMS
Electron beams
Thermal conductivity
Electrons

Keywords

  • Field emission
  • MEMS
  • Metal grid

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Kim, J., Kim, J. I., Kim, G. J., Heo, D., Jeon, S. G., Shin, D. H., ... Lee, C. J. (2012). Silicon based micro-scale metal grid for field emission device. In Technical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012 (pp. 278-279). [6316932] https://doi.org/10.1109/IVNC.2012.6316932

Silicon based micro-scale metal grid for field emission device. / Kim, Jaehong; Kim, Jung Il; Kim, Geun Ju; Heo, Duchang; Jeon, Seok Gy; Shin, Dong Hoon; Sun, Yuning; Lee, Cheol Jin.

Technical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012. 2012. p. 278-279 6316932.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, J, Kim, JI, Kim, GJ, Heo, D, Jeon, SG, Shin, DH, Sun, Y & Lee, CJ 2012, Silicon based micro-scale metal grid for field emission device. in Technical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012., 6316932, pp. 278-279, 25th International Vacuum Nanoelectronics Conference, IVNC 2012, Jeju, Korea, Republic of, 12/7/9. https://doi.org/10.1109/IVNC.2012.6316932
Kim J, Kim JI, Kim GJ, Heo D, Jeon SG, Shin DH et al. Silicon based micro-scale metal grid for field emission device. In Technical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012. 2012. p. 278-279. 6316932 https://doi.org/10.1109/IVNC.2012.6316932
Kim, Jaehong ; Kim, Jung Il ; Kim, Geun Ju ; Heo, Duchang ; Jeon, Seok Gy ; Shin, Dong Hoon ; Sun, Yuning ; Lee, Cheol Jin. / Silicon based micro-scale metal grid for field emission device. Technical Digest - 25th International Vacuum Nanoelectronics Conference, IVNC 2012. 2012. pp. 278-279
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