Simple assembling technique of single-walled carbon nanotubes using only photolithography

Kyeong Heon Kim, T. G. Kim, Seok Lee, Young Min Jhon, Sun Ho Kim, Young Tae Byun

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

In this paper, a novel technique for the assembly of single-walled carbon nanotubes (SWCNTs), and which was demonstrated using only a photolithographic process without additional chemical steps, is proposed. In this new process, unlike the conventional self-assembled process using octadecyltrichlorosilane (OTS), the SWCNTs could be selectively absorbed on a SiO2/Si substrate. First of all, the selectively assembled channels of the SWCNTs were fabricated on the SiO2 surface for a field effect transistor (FET). We finally fabricated SWCNT-based FETs by using our proposed technique. This technique will provide a useful basis for the implementation of various FET devices with SWCNT channels.

Original languageEnglish
Pages (from-to)1380-1383
Number of pages4
JournalJournal of the Korean Physical Society
Volume58
Issue number5
DOIs
Publication statusPublished - 2011 May 13

Keywords

  • FET
  • Photolithography
  • SAM
  • SWCNT

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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