Simple micro-scale selective patterning on a single nanowire by using an optical microscope

Dong Jin Oh, Boone Won, Kang Hyun Kim, Gyu-Tae Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A simple convenient way of forming a selective patterning on a single nanowire was demonstrated by using a conventional optical microscope. The fine resolution could reach approximately 5 μ m, which is enough to define electrode patterns on a single nanowire in a two-probe configuration. The photolithographic processes were carried out under the microscope with photoresist-coated substrate deposited by nanowires. Through the image capture and a proper configuration of the various home-made photomasks could produce a selective patterning on an individual nanowire successfully. Current-voltage characteristics of an individual GaN single nanowire were measured as a demonstration.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsB.W. Smith
Pages1500-1507
Number of pages8
Volume5754
EditionPART 3
DOIs
Publication statusPublished - 2005
EventOptical Microlithography XVIII - San Jose, CA, United States
Duration: 2005 Mar 12005 Mar 4

Other

OtherOptical Microlithography XVIII
CountryUnited States
CitySan Jose, CA
Period05/3/105/3/4

Fingerprint

optical microscopes
Nanowires
Microscopes
nanowires
Photomasks
photomasks
Photoresists
Current voltage characteristics
configurations
photoresists
Demonstrations
microscopes
Electrodes
electrodes
probes
electric potential
Substrates

Keywords

  • Nanowire
  • Optical microscope
  • Photo lithography
  • Selective patterning

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Oh, D. J., Won, B., Kim, K. H., & Kim, G-T. (2005). Simple micro-scale selective patterning on a single nanowire by using an optical microscope. In B. W. Smith (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (PART 3 ed., Vol. 5754, pp. 1500-1507). [166] https://doi.org/10.1117/12.599540

Simple micro-scale selective patterning on a single nanowire by using an optical microscope. / Oh, Dong Jin; Won, Boone; Kim, Kang Hyun; Kim, Gyu-Tae.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / B.W. Smith. Vol. 5754 PART 3. ed. 2005. p. 1500-1507 166.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Oh, DJ, Won, B, Kim, KH & Kim, G-T 2005, Simple micro-scale selective patterning on a single nanowire by using an optical microscope. in BW Smith (ed.), Proceedings of SPIE - The International Society for Optical Engineering. PART 3 edn, vol. 5754, 166, pp. 1500-1507, Optical Microlithography XVIII, San Jose, CA, United States, 05/3/1. https://doi.org/10.1117/12.599540
Oh DJ, Won B, Kim KH, Kim G-T. Simple micro-scale selective patterning on a single nanowire by using an optical microscope. In Smith BW, editor, Proceedings of SPIE - The International Society for Optical Engineering. PART 3 ed. Vol. 5754. 2005. p. 1500-1507. 166 https://doi.org/10.1117/12.599540
Oh, Dong Jin ; Won, Boone ; Kim, Kang Hyun ; Kim, Gyu-Tae. / Simple micro-scale selective patterning on a single nanowire by using an optical microscope. Proceedings of SPIE - The International Society for Optical Engineering. editor / B.W. Smith. Vol. 5754 PART 3. ed. 2005. pp. 1500-1507
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