Simulation and Fabrication of a KID Sensor for the CMB Polarization Measurement

Eunil Won, Kyungmin Lee, Mitsuhiro Yoshida

Research output: Contribution to journalArticle

Abstract

We designed prototype Kinetic Inductance Detectors (KID) to test sensors for a Cosmic Microwave Background (CMB) experiments. The design has been simulated extensively with a commercially available software for the optimization of the KID sensor. A coplanar waveguide type photo mask is designed and a KID sensor is fabricated with Nb thin film. The goal of this design and fabrication of the protype KID is to understand behaviors of basic design parameters and fundamental properties of the sensor. The basic resonator parameters are measured and their implications are discussed.

Original languageEnglish
Pages (from-to)348-352
Number of pages5
JournalJournal of the Korean Physical Society
Volume72
Issue number3
DOIs
Publication statusPublished - 2018 Feb 1

Fingerprint

inductance
microwaves
fabrication
sensors
detectors
kinetics
polarization
simulation
masks
resonators
prototypes
waveguides
computer programs
optimization
thin films

Keywords

  • Cosmic Microwave Background
  • Kinetic Inductance Detectors

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Simulation and Fabrication of a KID Sensor for the CMB Polarization Measurement. / Won, Eunil; Lee, Kyungmin; Yoshida, Mitsuhiro.

In: Journal of the Korean Physical Society, Vol. 72, No. 3, 01.02.2018, p. 348-352.

Research output: Contribution to journalArticle

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