Simultaneous measurement of thermal conductivity and interface thermal conductance of diamond thin film

Byeonghee Lee, Joon Sik Lee, Sun Ung Kim, Kyeongtae Kim, Ohmyoung Kwon, Seungkoo Lee, Jong Hoon Kim, Dae Soon Lim

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The authors developed an experimental method that can measure the in-plane thermal conductivity of a thin film and the interface thermal conductance between the film and the metal strip, simultaneously. This technique, the in-plane 3ω method, can be applied to the films with very high thermal conductivity such as diamond films. To guarantee the reliability of the measurement, the factors causing error were analyzed rigorously. Then, the method was demonstrated on silicon dioxide and silicon nitride films and was valid in experiments performed in the open atmosphere. They also applied the method on several chemical vapor deposited diamond films of different thicknesses and pretreatment methods. The data are comparable with those from previous researches.

Original languageEnglish
Pages (from-to)2408-2412
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume27
Issue number6
DOIs
Publication statusPublished - 2009

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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