Single-walled carbon nanotube based gas sensor with nanoscale electrode interval using sacrificial oxide layer

Jinwoo Lee, Kyongsoo Lee, Woosung Cho, Byeongkwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We developed a chemical gas sensor using SWCNT(single-walled carbon nanotubes) with nanoscale electrode-interval. To fabricate electrode pattern, we designed at first a continuous electrode pattern without any intervals. Then, the nanoscale interval was formed by a nanoscale trench using a sacrificial oxide layer located at the center of electrode. By this technique we obtained an electrode pattern with 100 nm interval. Though, the nanoscale interval can be realized by various nanolithography techniques including nanoimprint, nano-MEMS technology is not yet standardized and still requires great expense for even a stamp fabrication. Our method consisted of well developed processes for microscale semiconductor fabrication including trench formation, polysilicon deposition, and thermal oxidation. We expect that our method will induce high reproducibility and is closer to the commercilization of nanotube based gas sensor with higher sensitivity.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Pages1400-1402
Number of pages3
DOIs
Publication statusPublished - 2006
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 2006 Oct 222006 Oct 25

Publication series

NameProceedings of IEEE Sensors

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period06/10/2206/10/25

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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    Lee, J., Lee, K., Cho, W., & Ju, B. (2006). Single-walled carbon nanotube based gas sensor with nanoscale electrode interval using sacrificial oxide layer. In 2006 5th IEEE Conference on Sensors (pp. 1400-1402). [4178888] (Proceedings of IEEE Sensors). https://doi.org/10.1109/ICSENS.2007.355893