Size control of crystalline germanium nanoparticles using inductively coupled nonthermal plasma

Kyoung Suk Oh, Ki Won Yang, Hong Tak Kim, Heon Lee, Jeong Chul Lee, Young Soo Sohn

Research output: Contribution to journalArticle

1 Citation (Scopus)


Inductively coupled nonthermal plasma has been utilized to synthesize size-tunable germanium nanoparticles (Ge NPs). Process pressure and radio-frequency (RF) power were modulated to investigate their effects on the size distribution of the synthesized Ge NPs. The size of the NPs was determined using transmission electron microscope (TEM) images. X-ray diffraction (XRD) analyses and Raman spectroscopy measurements were utilized to confirm the crystallinity of the synthesized Ge NPs. The consistency between the XRD analysis and the diffraction patterns from the TEM analysis indicated that the synthesized the Ge NPs were crystalline. Ge NPs with a mean diameter of less than 10 nm can be synthesized under proper experimental conditions.

Original languageEnglish
Pages (from-to)571-574
Number of pages4
JournalJournal of Nanoelectronics and Optoelectronics
Issue number6
Publication statusPublished - 2013 Dec 1



  • Crystal
  • Germanium
  • Nanoparticle
  • Nonthermal Plasma

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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