Size effect on tensile strength of surface-micromachined Al-3%Ti thin films

Jun Hyub Park, Man Sik Myung, Yun-Jae Kim, Chang Seung Lee, Sung Hoon Choa, Woo Seong Che

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.

Original languageEnglish
Pages (from-to)313-316
Number of pages4
JournalKey Engineering Materials
Volume326-328 I
Publication statusPublished - 2006 Dec 6

Fingerprint

Tensile strength
Sawing
Thin films
Displacement measurement
Tensile testing
MEMS
Capacitance
Actuators
Switches

Keywords

  • Mechanical properties
  • RF MEMS Switch
  • Size effect
  • Tensile loading
  • Thin film

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemical Engineering (miscellaneous)

Cite this

Park, J. H., Myung, M. S., Kim, Y-J., Lee, C. S., Choa, S. H., & Che, W. S. (2006). Size effect on tensile strength of surface-micromachined Al-3%Ti thin films. Key Engineering Materials, 326-328 I, 313-316.

Size effect on tensile strength of surface-micromachined Al-3%Ti thin films. / Park, Jun Hyub; Myung, Man Sik; Kim, Yun-Jae; Lee, Chang Seung; Choa, Sung Hoon; Che, Woo Seong.

In: Key Engineering Materials, Vol. 326-328 I, 06.12.2006, p. 313-316.

Research output: Contribution to journalArticle

Park, JH, Myung, MS, Kim, Y-J, Lee, CS, Choa, SH & Che, WS 2006, 'Size effect on tensile strength of surface-micromachined Al-3%Ti thin films', Key Engineering Materials, vol. 326-328 I, pp. 313-316.
Park JH, Myung MS, Kim Y-J, Lee CS, Choa SH, Che WS. Size effect on tensile strength of surface-micromachined Al-3%Ti thin films. Key Engineering Materials. 2006 Dec 6;326-328 I:313-316.
Park, Jun Hyub ; Myung, Man Sik ; Kim, Yun-Jae ; Lee, Chang Seung ; Choa, Sung Hoon ; Che, Woo Seong. / Size effect on tensile strength of surface-micromachined Al-3%Ti thin films. In: Key Engineering Materials. 2006 ; Vol. 326-328 I. pp. 313-316.
@article{de640d4ee8ea457a92c8d449c7fe4bb2,
title = "Size effect on tensile strength of surface-micromachined Al-3{\%}Ti thin films",
abstract = "A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3{\%}Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3{\%}Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3{\%}Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.",
keywords = "Mechanical properties, RF MEMS Switch, Size effect, Tensile loading, Thin film",
author = "Park, {Jun Hyub} and Myung, {Man Sik} and Yun-Jae Kim and Lee, {Chang Seung} and Choa, {Sung Hoon} and Che, {Woo Seong}",
year = "2006",
month = "12",
day = "6",
language = "English",
volume = "326-328 I",
pages = "313--316",
journal = "Key Engineering Materials",
issn = "1013-9826",
publisher = "Trans Tech Publications",

}

TY - JOUR

T1 - Size effect on tensile strength of surface-micromachined Al-3%Ti thin films

AU - Park, Jun Hyub

AU - Myung, Man Sik

AU - Kim, Yun-Jae

AU - Lee, Chang Seung

AU - Choa, Sung Hoon

AU - Che, Woo Seong

PY - 2006/12/6

Y1 - 2006/12/6

N2 - A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.

AB - A new tensile tester using an electromagnetic-force actuator (voice coil) was developed to measure the mechanical characteristics of surface-micromachined thin film materials. The tester has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. The tester was applied for tensile testing of Al-3%Ti thin films with dimensions of 1000μm long, 50-480μm wide and 1.0 and 1.1 μm thick. The Al-3%Ti is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The specimen with holes and bridges was designed for easy tensile test. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. It was found that the mean tensile strengths of Al-3%Ti are 140-380MPa, depending on the width of specimens and converging to a certain tensile strength as the width decreases.

KW - Mechanical properties

KW - RF MEMS Switch

KW - Size effect

KW - Tensile loading

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=33751502507&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33751502507&partnerID=8YFLogxK

M3 - Article

VL - 326-328 I

SP - 313

EP - 316

JO - Key Engineering Materials

JF - Key Engineering Materials

SN - 1013-9826

ER -