Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform

Jonghyurk Park, Junghwan Huh, S. Z. Ali, Florin Udrea, J. W. Gardner, Gyu-Tae Kim, Sunglyul Maeng, W. I. Milne

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Smart chemical sensor based on CMOS(complementary metal-oxide- semiconductor) compatible SOI(silicon on insulator) microheater platform was realized by facilitating ZnO nanowires growth on the small membrane at the relatively low temperature. Our SOI microheater platform can be operated at the very low power consumption with novel metal oxide sensing materials, like ZnO or SnO2 nanostructured materials which demand relatively high sensing temperature. In addition, our sol-gel growth method of ZnO nanowires on the SOI membrane was found to be very effective compared with ink-jetting or CVD growth techniques. These combined techniques give us the possibility of smart chemical sensor technology easily merged into the conventional semiconductor IC application. The physical properties of ZnO nanowire network grown by the solution-based method and its chemical sensing property also were reported in this paper.

Original languageEnglish
Title of host publication2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
Pages418-421
Number of pages4
Volume1
Publication statusPublished - 2007 Aug 24
Event2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 - Santa Clara, CA, United States
Duration: 2007 May 202007 May 24

Other

Other2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007
CountryUnited States
CitySanta Clara, CA
Period07/5/2007/5/24

Keywords

  • CMOS compatible SOI microheater
  • Smart chemical sensor and sol-gel growth
  • ZnO nanowire

ASJC Scopus subject areas

  • Mechanical Engineering

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  • Cite this

    Park, J., Huh, J., Ali, S. Z., Udrea, F., Gardner, J. W., Kim, G-T., Maeng, S., & Milne, W. I. (2007). Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform. In 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings (Vol. 1, pp. 418-421)