Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform

Jonghyurk Park, Junghwan Huh, S. Z. Ali, Florin Udrea, J. W. Gardner, Gyu-Tae Kim, Sunglyul Maeng, W. I. Milne

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Smart chemical sensor based on CMOS(complementary metal-oxide- semiconductor) compatible SOI(silicon on insulator) microheater platform was realized by facilitating ZnO nanowires growth on the small membrane at the relatively low temperature. Our SOI microheater platform can be operated at the very low power consumption with novel metal oxide sensing materials, like ZnO or SnO2 nanostructured materials which demand relatively high sensing temperature. In addition, our sol-gel growth method of ZnO nanowires on the SOI membrane was found to be very effective compared with ink-jetting or CVD growth techniques. These combined techniques give us the possibility of smart chemical sensor technology easily merged into the conventional semiconductor IC application. The physical properties of ZnO nanowire network grown by the solution-based method and its chemical sensing property also were reported in this paper.

Original languageEnglish
Title of host publication2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings
Pages418-421
Number of pages4
Volume1
Publication statusPublished - 2007 Aug 24
Event2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007 - Santa Clara, CA, United States
Duration: 2007 May 202007 May 24

Other

Other2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007
CountryUnited States
CitySanta Clara, CA
Period07/5/2007/5/24

Fingerprint

Smart sensors
Chemical sensors
Nanowires
Silicon
Metals
Membranes
Nanostructured materials
Ink
Sol-gels
Chemical vapor deposition
Electric power utilization
Physical properties
Semiconductor materials
Temperature
Oxides
Oxide semiconductors

Keywords

  • CMOS compatible SOI microheater
  • Smart chemical sensor and sol-gel growth
  • ZnO nanowire

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Park, J., Huh, J., Ali, S. Z., Udrea, F., Gardner, J. W., Kim, G-T., ... Milne, W. I. (2007). Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform. In 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings (Vol. 1, pp. 418-421)

Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform. / Park, Jonghyurk; Huh, Junghwan; Ali, S. Z.; Udrea, Florin; Gardner, J. W.; Kim, Gyu-Tae; Maeng, Sunglyul; Milne, W. I.

2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings. Vol. 1 2007. p. 418-421.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Park, J, Huh, J, Ali, SZ, Udrea, F, Gardner, JW, Kim, G-T, Maeng, S & Milne, WI 2007, Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform. in 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings. vol. 1, pp. 418-421, 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Santa Clara, CA, United States, 07/5/20.
Park J, Huh J, Ali SZ, Udrea F, Gardner JW, Kim G-T et al. Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform. In 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings. Vol. 1. 2007. p. 418-421
Park, Jonghyurk ; Huh, Junghwan ; Ali, S. Z. ; Udrea, Florin ; Gardner, J. W. ; Kim, Gyu-Tae ; Maeng, Sunglyul ; Milne, W. I. / Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform. 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings. Vol. 1 2007. pp. 418-421
@inproceedings{2ac0b3b2dda2411ea8e9749169b87a4e,
title = "Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform",
abstract = "Smart chemical sensor based on CMOS(complementary metal-oxide- semiconductor) compatible SOI(silicon on insulator) microheater platform was realized by facilitating ZnO nanowires growth on the small membrane at the relatively low temperature. Our SOI microheater platform can be operated at the very low power consumption with novel metal oxide sensing materials, like ZnO or SnO2 nanostructured materials which demand relatively high sensing temperature. In addition, our sol-gel growth method of ZnO nanowires on the SOI membrane was found to be very effective compared with ink-jetting or CVD growth techniques. These combined techniques give us the possibility of smart chemical sensor technology easily merged into the conventional semiconductor IC application. The physical properties of ZnO nanowire network grown by the solution-based method and its chemical sensing property also were reported in this paper.",
keywords = "CMOS compatible SOI microheater, Smart chemical sensor and sol-gel growth, ZnO nanowire",
author = "Jonghyurk Park and Junghwan Huh and Ali, {S. Z.} and Florin Udrea and Gardner, {J. W.} and Gyu-Tae Kim and Sunglyul Maeng and Milne, {W. I.}",
year = "2007",
month = "8",
day = "24",
language = "English",
isbn = "1420063421",
volume = "1",
pages = "418--421",
booktitle = "2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings",

}

TY - GEN

T1 - Smart chemical sensor application of ZnO nanowires grown on CMOS compatible SOI microheater platform

AU - Park, Jonghyurk

AU - Huh, Junghwan

AU - Ali, S. Z.

AU - Udrea, Florin

AU - Gardner, J. W.

AU - Kim, Gyu-Tae

AU - Maeng, Sunglyul

AU - Milne, W. I.

PY - 2007/8/24

Y1 - 2007/8/24

N2 - Smart chemical sensor based on CMOS(complementary metal-oxide- semiconductor) compatible SOI(silicon on insulator) microheater platform was realized by facilitating ZnO nanowires growth on the small membrane at the relatively low temperature. Our SOI microheater platform can be operated at the very low power consumption with novel metal oxide sensing materials, like ZnO or SnO2 nanostructured materials which demand relatively high sensing temperature. In addition, our sol-gel growth method of ZnO nanowires on the SOI membrane was found to be very effective compared with ink-jetting or CVD growth techniques. These combined techniques give us the possibility of smart chemical sensor technology easily merged into the conventional semiconductor IC application. The physical properties of ZnO nanowire network grown by the solution-based method and its chemical sensing property also were reported in this paper.

AB - Smart chemical sensor based on CMOS(complementary metal-oxide- semiconductor) compatible SOI(silicon on insulator) microheater platform was realized by facilitating ZnO nanowires growth on the small membrane at the relatively low temperature. Our SOI microheater platform can be operated at the very low power consumption with novel metal oxide sensing materials, like ZnO or SnO2 nanostructured materials which demand relatively high sensing temperature. In addition, our sol-gel growth method of ZnO nanowires on the SOI membrane was found to be very effective compared with ink-jetting or CVD growth techniques. These combined techniques give us the possibility of smart chemical sensor technology easily merged into the conventional semiconductor IC application. The physical properties of ZnO nanowire network grown by the solution-based method and its chemical sensing property also were reported in this paper.

KW - CMOS compatible SOI microheater

KW - Smart chemical sensor and sol-gel growth

KW - ZnO nanowire

UR - http://www.scopus.com/inward/record.url?scp=34548012387&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34548012387&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:34548012387

SN - 1420063421

SN - 9781420063424

SN - 1420061828

SN - 9781420061826

VL - 1

SP - 418

EP - 421

BT - 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings

ER -