SnO2 gas sensors using LTCC (Low temperature Co-fired ceramics)

Pyeong Seok Cho, Chong-Yun Kang, Sun Jung Kim, Jin Sang Kim, Seok Jin Yoon, Nguyen Van Hieu, Jong Heun Lee

Research output: Contribution to journalArticle

Abstract

A sensor element array for combinatorial solution deposition research was fabricated using LTCC (Low-temperature Co-fired Ceramics). The designed LTCC was co-fired at 800°C for 1 hour after lamination at 70°C under 3000 psi for 30 minutes. SnO2 sol was prepared by a hydrothermal method at 200°C for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and the ammonia solution was added to a Teflon jar. 20 droplets of SnO2 sol were deposited onto a LTCC sensor element and this was heat treated at 600°C for 5 hours. The gas sensitivity (S = Ra/Rg) values of the SnO2 sensor and 0.04 wt% Pd-added SnO2 sensor were measured. The 0.04 wt% Pd-added SnO2 sensor showed higher sensitivity (S = 8.1) compared to the SnO2 sensor (S = 5.95) to 200 ppm CH3COCH3 at 400°C.

Original languageEnglish
Pages (from-to)69-72
Number of pages4
JournalKorean Journal of Materials Research
Volume18
Issue number2
DOIs
Publication statusPublished - 2008 Feb 1

Fingerprint

Chemical sensors
Sensors
Polymethyl Methacrylate
Sols
Temperature
Polytetrafluoroethylene
Polytetrafluoroethylenes
Ammonia
Tin
Carbonates
Raw materials
Gases

Keywords

  • Combinatorial solution deposition
  • Gas sensor
  • LTCC (Low Temperature Co-fired Ceramics)
  • SnO sol

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

SnO2 gas sensors using LTCC (Low temperature Co-fired ceramics). / Cho, Pyeong Seok; Kang, Chong-Yun; Kim, Sun Jung; Kim, Jin Sang; Yoon, Seok Jin; Van Hieu, Nguyen; Lee, Jong Heun.

In: Korean Journal of Materials Research, Vol. 18, No. 2, 01.02.2008, p. 69-72.

Research output: Contribution to journalArticle

Cho, Pyeong Seok ; Kang, Chong-Yun ; Kim, Sun Jung ; Kim, Jin Sang ; Yoon, Seok Jin ; Van Hieu, Nguyen ; Lee, Jong Heun. / SnO2 gas sensors using LTCC (Low temperature Co-fired ceramics). In: Korean Journal of Materials Research. 2008 ; Vol. 18, No. 2. pp. 69-72.
@article{618eb0ea921e44b1ab6bccdef3237838,
title = "SnO2 gas sensors using LTCC (Low temperature Co-fired ceramics)",
abstract = "A sensor element array for combinatorial solution deposition research was fabricated using LTCC (Low-temperature Co-fired Ceramics). The designed LTCC was co-fired at 800°C for 1 hour after lamination at 70°C under 3000 psi for 30 minutes. SnO2 sol was prepared by a hydrothermal method at 200°C for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and the ammonia solution was added to a Teflon jar. 20 droplets of SnO2 sol were deposited onto a LTCC sensor element and this was heat treated at 600°C for 5 hours. The gas sensitivity (S = Ra/Rg) values of the SnO2 sensor and 0.04 wt{\%} Pd-added SnO2 sensor were measured. The 0.04 wt{\%} Pd-added SnO2 sensor showed higher sensitivity (S = 8.1) compared to the SnO2 sensor (S = 5.95) to 200 ppm CH3COCH3 at 400°C.",
keywords = "Combinatorial solution deposition, Gas sensor, LTCC (Low Temperature Co-fired Ceramics), SnO sol",
author = "Cho, {Pyeong Seok} and Chong-Yun Kang and Kim, {Sun Jung} and Kim, {Jin Sang} and Yoon, {Seok Jin} and {Van Hieu}, Nguyen and Lee, {Jong Heun}",
year = "2008",
month = "2",
day = "1",
doi = "10.3740/MRSK.2008.18.2.069",
language = "English",
volume = "18",
pages = "69--72",
journal = "Korean Journal of Materials Research",
issn = "1225-0562",
publisher = "The Korea Federation of Science and Technology",
number = "2",

}

TY - JOUR

T1 - SnO2 gas sensors using LTCC (Low temperature Co-fired ceramics)

AU - Cho, Pyeong Seok

AU - Kang, Chong-Yun

AU - Kim, Sun Jung

AU - Kim, Jin Sang

AU - Yoon, Seok Jin

AU - Van Hieu, Nguyen

AU - Lee, Jong Heun

PY - 2008/2/1

Y1 - 2008/2/1

N2 - A sensor element array for combinatorial solution deposition research was fabricated using LTCC (Low-temperature Co-fired Ceramics). The designed LTCC was co-fired at 800°C for 1 hour after lamination at 70°C under 3000 psi for 30 minutes. SnO2 sol was prepared by a hydrothermal method at 200°C for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and the ammonia solution was added to a Teflon jar. 20 droplets of SnO2 sol were deposited onto a LTCC sensor element and this was heat treated at 600°C for 5 hours. The gas sensitivity (S = Ra/Rg) values of the SnO2 sensor and 0.04 wt% Pd-added SnO2 sensor were measured. The 0.04 wt% Pd-added SnO2 sensor showed higher sensitivity (S = 8.1) compared to the SnO2 sensor (S = 5.95) to 200 ppm CH3COCH3 at 400°C.

AB - A sensor element array for combinatorial solution deposition research was fabricated using LTCC (Low-temperature Co-fired Ceramics). The designed LTCC was co-fired at 800°C for 1 hour after lamination at 70°C under 3000 psi for 30 minutes. SnO2 sol was prepared by a hydrothermal method at 200°C for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and the ammonia solution was added to a Teflon jar. 20 droplets of SnO2 sol were deposited onto a LTCC sensor element and this was heat treated at 600°C for 5 hours. The gas sensitivity (S = Ra/Rg) values of the SnO2 sensor and 0.04 wt% Pd-added SnO2 sensor were measured. The 0.04 wt% Pd-added SnO2 sensor showed higher sensitivity (S = 8.1) compared to the SnO2 sensor (S = 5.95) to 200 ppm CH3COCH3 at 400°C.

KW - Combinatorial solution deposition

KW - Gas sensor

KW - LTCC (Low Temperature Co-fired Ceramics)

KW - SnO sol

UR - http://www.scopus.com/inward/record.url?scp=40749158678&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=40749158678&partnerID=8YFLogxK

U2 - 10.3740/MRSK.2008.18.2.069

DO - 10.3740/MRSK.2008.18.2.069

M3 - Article

VL - 18

SP - 69

EP - 72

JO - Korean Journal of Materials Research

JF - Korean Journal of Materials Research

SN - 1225-0562

IS - 2

ER -