SnO2 gas sensors using LTCC (Low temperature Co-fired ceramics)

Pyeong Seok Cho, Chong-Yun Kang, Sun Jung Kim, Jin Sang Kim, Seok Jin Yoon, Nguyen Van Hieu, Jong Heun Lee

Research output: Contribution to journalArticle

Abstract

A sensor element array for combinatorial solution deposition research was fabricated using LTCC (Low-temperature Co-fired Ceramics). The designed LTCC was co-fired at 800°C for 1 hour after lamination at 70°C under 3000 psi for 30 minutes. SnO2 sol was prepared by a hydrothermal method at 200°C for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and the ammonia solution was added to a Teflon jar. 20 droplets of SnO2 sol were deposited onto a LTCC sensor element and this was heat treated at 600°C for 5 hours. The gas sensitivity (S = Ra/Rg) values of the SnO2 sensor and 0.04 wt% Pd-added SnO2 sensor were measured. The 0.04 wt% Pd-added SnO2 sensor showed higher sensitivity (S = 8.1) compared to the SnO2 sensor (S = 5.95) to 200 ppm CH3COCH3 at 400°C.

Original languageEnglish
Pages (from-to)69-72
Number of pages4
JournalKorean Journal of Materials Research
Volume18
Issue number2
DOIs
Publication statusPublished - 2008 Feb 1

Keywords

  • Combinatorial solution deposition
  • Gas sensor
  • LTCC (Low Temperature Co-fired Ceramics)
  • SnO sol

ASJC Scopus subject areas

  • Materials Science(all)

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