Spatial distribution of interface traps in sub-50-nm recess-channel-type DRAM cell transistors

Eun Ae Chung, Young Pil Kim, Min Chul Park, Kab Jin Nam, Sung Sam Lee, Ji Young Min, Giyoung Yang, Yu Gyun Shin, Siyoung Choi, Gyoyoung Jin, Joo Tae Moon, Sangsig Kim

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