Specific contact resistivity reduction through Ar plasma-treated TiO2-x interfacial layer to metal/Ge contact

Gwang Sik Kim, Jeong Kyu Kim, Seung Hwan Kim, Jaesung Jo, Changhwan Shin, Jin Hong Park, Krishna C. Saraswat, Hyun-Yong Yu

Research output: Contribution to journalArticle

25 Citations (Scopus)

Abstract

We demonstrate contact resistivity reduction by inserting an Ar plasma-treated TiO2-x heavily doped interfacial layer to metal/semiconductor contact to overcome a Fermi-level pinning problem on germanium (Ge). A specific contact resistivity of 3.16 × 10-3 Ω · cm2 on moderately doped n-type Ge substrate (6× 1016 cm-3) was achieved, exhibiting (× 584) reduction from Ti/Ge structure, and (× 11) reduction from Ti/undoped TiO2/Ge structure. A novel doping technique for TiO2 interfacial layer at low temperature using Ar plasma was presented to lower S/D contact resistance in Ge n-MOSFET.

Original languageEnglish
Pages (from-to)1076-1078
Number of pages3
JournalIEEE Electron Device Letters
Volume35
Issue number11
DOIs
Publication statusPublished - 2014 Nov 1

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Germanium
Metals
Plasmas
Contact resistance
Fermi level
Doping (additives)
Semiconductor materials
Substrates

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Specific contact resistivity reduction through Ar plasma-treated TiO2-x interfacial layer to metal/Ge contact. / Kim, Gwang Sik; Kim, Jeong Kyu; Kim, Seung Hwan; Jo, Jaesung; Shin, Changhwan; Park, Jin Hong; Saraswat, Krishna C.; Yu, Hyun-Yong.

In: IEEE Electron Device Letters, Vol. 35, No. 11, 01.11.2014, p. 1076-1078.

Research output: Contribution to journalArticle

Kim, Gwang Sik ; Kim, Jeong Kyu ; Kim, Seung Hwan ; Jo, Jaesung ; Shin, Changhwan ; Park, Jin Hong ; Saraswat, Krishna C. ; Yu, Hyun-Yong. / Specific contact resistivity reduction through Ar plasma-treated TiO2-x interfacial layer to metal/Ge contact. In: IEEE Electron Device Letters. 2014 ; Vol. 35, No. 11. pp. 1076-1078.
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AU - Shin, Changhwan

AU - Park, Jin Hong

AU - Saraswat, Krishna C.

AU - Yu, Hyun-Yong

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