Fingerprint
Dive into the research topics of 'Spline regression based feature extraction for semiconductor process fault detection using support vector machine'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Spline regression based feature extraction for semiconductor process fault detection using support vector machine
Jonghyuck Park, Ick Hyun Kwon, Sung Shick Kim, Jun Geol Baek
Research output: Contribution to journal › Article › peer-review
28
Citations
(Scopus)