Spontaneous registration of Sub-10 nm features based on subzero celsius spin-casting of self-assembling building blocks directed by chemically encoded surfaces

Jung Hye Lee, Hak Jong Choi, Chulhee Lee, Seung Won Song, Joong Bum Lee, Daihong Huh, Yoon Sung Nam, Duk Young Jeon, Heon Lee, Yeon Sik Jung

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

For low-cost and facile fabrication of innovative nanoscale devices with outstanding functionality and performance, it is critical to develop more practical patterning solutions that are applicable to a wide range of materials and feature sizes while minimizing detrimental effects by processing conditions. In this study, we report that area-selective sub-10 nm pattern formation can be realized by temperature-controlled spin-casting of block copolymers (BCPs) combined with submicron-scale-patterned chemical surfaces. Compared to conventional room-temperature spin-casting, the low temperature (e.g.,-5 °C) casting of the BCP solution on the patterned self-assembled monolayer achieved substantially improved area selectivity and uniformity, which can be explained by optimized solvent evaporation kinetics during the last stage of film formation. Moreover, the application of cold spin-casting can also provide high-yield in situ patterning of light-emitting CdSe/ZnS quantum dot thin films, indicating that this temperature-optimized spin-casting strategy would be highly effective for tailored patterning of diverse organic and hybrid materials in solution phase.

Original languageEnglish
Pages (from-to)8224-8233
Number of pages10
JournalACS Nano
Volume12
Issue number8
DOIs
Publication statusPublished - 2018 Aug 28

Keywords

  • block copolymers
  • cold spin-casting
  • quantum dots
  • self-assembled monolayer
  • spontaneous registration

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)

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