Sputter-deposited low loss Mg2SiO4 thin films for multilayer hybrids

Chan Su Han, Bhaskar Chandra Mohanty, Chong-Yun Kang, Yong Soo Cho

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Mg2SiO4 (forsterite) thin films grown by rf magnetron sputtering from a ceramic target have been investigated particularly for thin film hybrids requiring a low loss dielectric layer. Understanding of the processing parameters and their correlations to dielectric properties is the main concern of this work. Fundamental parameters, such as working pressure and post-deposition annealing temperature, were found to influence phase evolution, morphology and dielectric properties. For example, polycrystalline α-Mg2SiO4 could be obtained above the annealing temperature of 500 C regardless of working pressure. The dielectric constant increased gradually while the dielectric loss showed a reverse trend of decrease with raising annealing temperature to 700 C. Dielectric constant of ~ 6.8 and dielectric loss of ~ 2.8 × 10- 3 were obtained at 1 MHz from the sample annealed at 700 C. A promising planarized thin film structure for fine line multilevel packaging was demonstrated without any significant inter-diffusion and damages between Mg2SiO4 and Pt layers.

Original languageEnglish
Pages (from-to)250-254
Number of pages5
JournalThin Solid Films
Volume527
DOIs
Publication statusPublished - 2013 Jan 1

Fingerprint

Dielectric losses
dielectric loss
Multilayers
Annealing
Thin films
Dielectric properties
annealing
dielectric properties
Permittivity
thin films
permittivity
forsterite
packaging
Magnetron sputtering
Temperature
temperature
Packaging
magnetron sputtering
ceramics
damage

Keywords

  • Atomic force microscopy
  • Crystallization
  • Dielectrics
  • Keywords
  • Magnesium silicate
  • Magnetron sputtering
  • Thin films
  • X-ray diffraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Sputter-deposited low loss Mg2SiO4 thin films for multilayer hybrids. / Han, Chan Su; Mohanty, Bhaskar Chandra; Kang, Chong-Yun; Cho, Yong Soo.

In: Thin Solid Films, Vol. 527, 01.01.2013, p. 250-254.

Research output: Contribution to journalArticle

Han, Chan Su ; Mohanty, Bhaskar Chandra ; Kang, Chong-Yun ; Cho, Yong Soo. / Sputter-deposited low loss Mg2SiO4 thin films for multilayer hybrids. In: Thin Solid Films. 2013 ; Vol. 527. pp. 250-254.
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