SrTiO3 thin films deposited by CLCB in combination with sol-gel processing

Hochul Kang, Sungho Park, Kyekyoon Kim, Man Young Sung, Hyungsoo Choi

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2 Citations (Scopus)

Abstract

High-quality SrTiO3 thin films were deposited by charged liquid cluster beam (CLCB) method using a strontium carboxylate with a sol-gel processed Ti precursor at substrate temperatures of 400 and 500°C. The film deposited at 400°C was crystallized at 600-700°C to give a granular structure (film I) while the film deposited at 500°C (film II) gave a columnar structure of high crystallinity without postannealing. The grain growth and electric properties, such as dielectric constant, dissipation factor, leakage current density, and breakdown field, of films I and II were compared.

Original languageEnglish
JournalElectrochemical and Solid-State Letters
Volume7
Issue number11
DOIs
Publication statusPublished - 2004 Dec 17

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ASJC Scopus subject areas

  • Electrochemistry
  • Materials Science(all)

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