Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode

Ju Yeoul Baek, Gu Han Kwon, Jeong Yun Kim, Jin Ho Cho, Seung Ha Lee, Kyung Sun, Sang Hoon Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

16 Citations (Scopus)

Abstract

PDMS(polydimethylsiloxane) is a flexible and biocompatible material and is widely used in bio- or medical-related fields. Recently, PDMS has been used as a substrate of implantable electrodes but has exhibited limits in stable metal layer deposition and patterning. In this paper, we have developed processes for both the stable metallization of PDMS surface and the selective patterning of conductive elements. The surface treatment via the oxygen plasma ions significantly affects the adhesion of metal layers to the PDMS surface, while the other factors exhibited no significant relations. On the basis of our procedure resulted in the effective production of the stable and fine (line width: 20 μm) electrode patterns on the PDMS substrate. Finally, we fabricated PDMS-based flexible and implantable micro electrode for the subretinal prosthesis.

Original languageEnglish
Title of host publicationDiffusion and Defect Data Pt.B: Solid State Phenomena
Pages165-168
Number of pages4
Volume124-126
EditionPART 1
Publication statusPublished - 2007 Dec 1
EventIUMRS International Conference in Asia 2006, IUMRS-ICA 2006 - Jeju, Korea, Republic of
Duration: 2006 Sep 102006 Sep 14

Publication series

NameDiffusion and Defect Data Pt.B: Solid State Phenomena
NumberPART 1
Volume124-126
ISSN (Print)10120394

Other

OtherIUMRS International Conference in Asia 2006, IUMRS-ICA 2006
CountryKorea, Republic of
CityJeju
Period06/9/1006/9/14

Fingerprint

Polydimethylsiloxane
Metals
Electrodes
electrodes
Substrates
metals
oxygen plasma
surface treatment
adhesion
Biocompatible Materials
Metallizing
Biomaterials
Chemical elements
Linewidth
Surface treatment
baysilon
ions
Adhesion
Ions
Oxygen

Keywords

  • Deposition conditions
  • Metal layer deposition
  • PDMS
  • Subretinal prosthesis
  • Surface treatment

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Baek, J. Y., Kwon, G. H., Kim, J. Y., Cho, J. H., Lee, S. H., Sun, K., & Lee, S. H. (2007). Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode. In Diffusion and Defect Data Pt.B: Solid State Phenomena (PART 1 ed., Vol. 124-126, pp. 165-168). (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 124-126, No. PART 1).

Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode. / Baek, Ju Yeoul; Kwon, Gu Han; Kim, Jeong Yun; Cho, Jin Ho; Lee, Seung Ha; Sun, Kyung; Lee, Sang Hoon.

Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 124-126 PART 1. ed. 2007. p. 165-168 (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 124-126, No. PART 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Baek, JY, Kwon, GH, Kim, JY, Cho, JH, Lee, SH, Sun, K & Lee, SH 2007, Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode. in Diffusion and Defect Data Pt.B: Solid State Phenomena. PART 1 edn, vol. 124-126, Diffusion and Defect Data Pt.B: Solid State Phenomena, no. PART 1, vol. 124-126, pp. 165-168, IUMRS International Conference in Asia 2006, IUMRS-ICA 2006, Jeju, Korea, Republic of, 06/9/10.
Baek JY, Kwon GH, Kim JY, Cho JH, Lee SH, Sun K et al. Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode. In Diffusion and Defect Data Pt.B: Solid State Phenomena. PART 1 ed. Vol. 124-126. 2007. p. 165-168. (Diffusion and Defect Data Pt.B: Solid State Phenomena; PART 1).
Baek, Ju Yeoul ; Kwon, Gu Han ; Kim, Jeong Yun ; Cho, Jin Ho ; Lee, Seung Ha ; Sun, Kyung ; Lee, Sang Hoon. / Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode. Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 124-126 PART 1. ed. 2007. pp. 165-168 (Diffusion and Defect Data Pt.B: Solid State Phenomena; PART 1).
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AU - Lee, Seung Ha

AU - Sun, Kyung

AU - Lee, Sang Hoon

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