Stable deposition and patterning of metal layers on the PDMS substrate and characterization for the development of the flexible and implantable micro electrode

Ju Yeoul Baek, Gu Han Kwon, Jeong Yun Kim, Jin Ho Cho, Seung Ha Lee, Kyung Sun, Sang Hoon Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

18 Citations (Scopus)

Abstract

PDMS(polydimethylsiloxane) is a flexible and biocompatible material and is widely used in bio- or medical-related fields. Recently, PDMS has been used as a substrate of implantable electrodes but has exhibited limits in stable metal layer deposition and patterning. In this paper, we have developed processes for both the stable metallization of PDMS surface and the selective patterning of conductive elements. The surface treatment via the oxygen plasma ions significantly affects the adhesion of metal layers to the PDMS surface, while the other factors exhibited no significant relations. On the basis of our procedure resulted in the effective production of the stable and fine (line width: 20 μm) electrode patterns on the PDMS substrate. Finally, we fabricated PDMS-based flexible and implantable micro electrode for the subretinal prosthesis.

Original languageEnglish
Title of host publicationAdvances in Nanomaterials and Processing - IUMRS - ICA - 2006 International Conference in Asia
PublisherTrans Tech Publications Ltd
Pages165-168
Number of pages4
EditionPART 1
ISBN (Print)3908451310, 9783908451310
Publication statusPublished - 2007
EventIUMRS International Conference in Asia 2006, IUMRS-ICA 2006 - Jeju, Korea, Republic of
Duration: 2006 Sep 102006 Sep 14

Publication series

NameSolid State Phenomena
NumberPART 1
Volume124-126
ISSN (Print)1012-0394

Other

OtherIUMRS International Conference in Asia 2006, IUMRS-ICA 2006
CountryKorea, Republic of
CityJeju
Period06/9/1006/9/14

Keywords

  • Deposition conditions
  • Metal layer deposition
  • PDMS
  • Subretinal prosthesis
  • Surface treatment

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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