Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism

Kyung S. Min, Woo Chun Choi, Shin H. Song, Eun J. Hwang

Research output: Contribution to journalArticle

21 Citations (Scopus)

Abstract

A displacement magnifying mechanism is usually employed in a nanopositioning stage to achieve large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. This study proposes a more reasonable model including flexible levers to estimate the stiffness and displacement of the stage. This paper describes an analytic lever model and its experimental verification. Analytic and experimental results were very similar. The model proposed in this study can well predict the stage motions.

Original languageEnglish
Pages (from-to)447-454
Number of pages8
JournalProceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture
Volume219
Issue number6
DOIs
Publication statusPublished - 2005 Jun 1

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ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

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