Structural and electrical properties of Bi5 Nb3 O15 thin films for MIM capacitors with low processing temperatures

Kyung Hoon Cho, Chang Hak Choi, Young Hun Jeong, Sahn Nahm, Chong-Yun Kang, Seok Jin Yoon, Hwack Joo Lee

Research output: Contribution to journalArticle

23 Citations (Scopus)

Abstract

Bi5 Nb3 O15 (B5 N3) thin films were well formed on a Pt/Ti/ SiO2 /Si substrate using radio-frequency magnetron sputtering. The crystalline B5 N3 phase was developed for the films grown at temperatures above 450°C, but it decomposed into the BiNbO3 phase when the growth temperature exceeded 550°C, probably due to the evaporation of Bi2 O3. The dielectric constant (k) of the B5 N3 film grown at room temperature was approximately 42 and increased with increasing growth temperature, reaching a maximum value of 160 for the film grown at 550°C. In particular, the B5 N3 films grown in the temperature range of 200-300°C showed a high k value of 70 with a low dissipation factor (<1.0%), and their leakage current density was very low with a high breakdown voltage. Therefore, B5 N3 films grown at low temperatures (≤300°C) can be a good candidate material for metal-insulator-metal (MIM) capacitors which require low processing temperatures.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume155
Issue number8
DOIs
Publication statusPublished - 2008 Jul 11

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Structural properties
capacitors
Electric properties
Capacitors
Metals
electrical properties
insulators
Thin films
thin films
Processing
metals
Growth temperature
Temperature
temperature
Electric breakdown
electrical faults
Leakage currents
Magnetron sputtering
radio frequencies
magnetron sputtering

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Structural and electrical properties of Bi5 Nb3 O15 thin films for MIM capacitors with low processing temperatures. / Cho, Kyung Hoon; Choi, Chang Hak; Jeong, Young Hun; Nahm, Sahn; Kang, Chong-Yun; Yoon, Seok Jin; Lee, Hwack Joo.

In: Journal of the Electrochemical Society, Vol. 155, No. 8, 11.07.2008.

Research output: Contribution to journalArticle

Cho, Kyung Hoon ; Choi, Chang Hak ; Jeong, Young Hun ; Nahm, Sahn ; Kang, Chong-Yun ; Yoon, Seok Jin ; Lee, Hwack Joo. / Structural and electrical properties of Bi5 Nb3 O15 thin films for MIM capacitors with low processing temperatures. In: Journal of the Electrochemical Society. 2008 ; Vol. 155, No. 8.
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AU - Kang, Chong-Yun

AU - Yoon, Seok Jin

AU - Lee, Hwack Joo

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