Structural and electrochemical properties of LiNi0.7Co 0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering

Youngmin Chung, Ho Young Park, Si Hyoung Oh, Dong Young Yoon, Sang Wan Jin, Dong Yoon Jang, Jang Myoun Ko, Won Il Cho, Seong Rae Lee

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

A LiNi0.7Co0.15Mn0.15O2 thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi 0.7Co0.15Mn0.15O2 target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 μAh cm-2 μm -1 was obtained from a half cell with the LiNi0.7Co 0.15Mn0.15O2 thin film cathode and lithium metal anode in the potential range of 4.3 ~ 2.5 V at 30 μA and its coulombic efficiency was more than 99 %.

Original languageEnglish
Pages (from-to)316-323
Number of pages8
JournalJournal of Electroceramics
Volume31
Issue number3-4
DOIs
Publication statusPublished - 2013 Dec 1

Fingerprint

Electrochemical properties
Magnetron sputtering
Structural properties
radio frequencies
magnetron sputtering
Cathodes
cathodes
direct current
Thin films
Rapid thermal annealing
Spectrophotometers
Glow discharges
Inductively coupled plasma
Auger electron spectroscopy
spectrophotometers
thin films
Lithium
glow discharges
Auger spectroscopy
Cyclic voltammetry

Keywords

  • Cathode
  • Glow discharge spectrometer
  • Hybrid direct current and radio frequency magnetron sputtering
  • LiNiCoMnO thin film
  • Thin film battery

ASJC Scopus subject areas

  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Mechanics of Materials

Cite this

Structural and electrochemical properties of LiNi0.7Co 0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering. / Chung, Youngmin; Park, Ho Young; Oh, Si Hyoung; Yoon, Dong Young; Jin, Sang Wan; Jang, Dong Yoon; Ko, Jang Myoun; Cho, Won Il; Lee, Seong Rae.

In: Journal of Electroceramics, Vol. 31, No. 3-4, 01.12.2013, p. 316-323.

Research output: Contribution to journalArticle

Chung, Youngmin ; Park, Ho Young ; Oh, Si Hyoung ; Yoon, Dong Young ; Jin, Sang Wan ; Jang, Dong Yoon ; Ko, Jang Myoun ; Cho, Won Il ; Lee, Seong Rae. / Structural and electrochemical properties of LiNi0.7Co 0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering. In: Journal of Electroceramics. 2013 ; Vol. 31, No. 3-4. pp. 316-323.
@article{dcd12b8d61b94fd69eb3d149ef6a8fc7,
title = "Structural and electrochemical properties of LiNi0.7Co 0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering",
abstract = "A LiNi0.7Co0.15Mn0.15O2 thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi 0.7Co0.15Mn0.15O2 target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 μAh cm-2 μm -1 was obtained from a half cell with the LiNi0.7Co 0.15Mn0.15O2 thin film cathode and lithium metal anode in the potential range of 4.3 ~ 2.5 V at 30 μA and its coulombic efficiency was more than 99 {\%}.",
keywords = "Cathode, Glow discharge spectrometer, Hybrid direct current and radio frequency magnetron sputtering, LiNiCoMnO thin film, Thin film battery",
author = "Youngmin Chung and Park, {Ho Young} and Oh, {Si Hyoung} and Yoon, {Dong Young} and Jin, {Sang Wan} and Jang, {Dong Yoon} and Ko, {Jang Myoun} and Cho, {Won Il} and Lee, {Seong Rae}",
year = "2013",
month = "12",
day = "1",
doi = "10.1007/s10832-013-9845-5",
language = "English",
volume = "31",
pages = "316--323",
journal = "Journal of Electroceramics",
issn = "1385-3449",
publisher = "Springer Netherlands",
number = "3-4",

}

TY - JOUR

T1 - Structural and electrochemical properties of LiNi0.7Co 0.15Mn0.15O2 thin film prepared by high frequency hybrid direct current and radio frequency magnetron sputtering

AU - Chung, Youngmin

AU - Park, Ho Young

AU - Oh, Si Hyoung

AU - Yoon, Dong Young

AU - Jin, Sang Wan

AU - Jang, Dong Yoon

AU - Ko, Jang Myoun

AU - Cho, Won Il

AU - Lee, Seong Rae

PY - 2013/12/1

Y1 - 2013/12/1

N2 - A LiNi0.7Co0.15Mn0.15O2 thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi 0.7Co0.15Mn0.15O2 target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 μAh cm-2 μm -1 was obtained from a half cell with the LiNi0.7Co 0.15Mn0.15O2 thin film cathode and lithium metal anode in the potential range of 4.3 ~ 2.5 V at 30 μA and its coulombic efficiency was more than 99 %.

AB - A LiNi0.7Co0.15Mn0.15O2 thin film cathode has been successfully prepared by hybrid direct current - radio frequency magnetron sputtering onto glass substrate from the LiNi 0.7Co0.15Mn0.15O2 target and post-annealed by the rapid thermal annealing process. Its structure and morphology were characterized by X-ray diffraction, and scanning electron microscopy while its chemical compositions were confirmed with the inductively coupled plasma atomic absorption spectrophotometer, Raman spectroscopy, Auger electron spectroscopy, and glow discharge spectrometer. Its electrochemical properties were measured by galvanostatic charge - discharge test and cyclic voltammetry. First discharge capacity of 73 μAh cm-2 μm -1 was obtained from a half cell with the LiNi0.7Co 0.15Mn0.15O2 thin film cathode and lithium metal anode in the potential range of 4.3 ~ 2.5 V at 30 μA and its coulombic efficiency was more than 99 %.

KW - Cathode

KW - Glow discharge spectrometer

KW - Hybrid direct current and radio frequency magnetron sputtering

KW - LiNiCoMnO thin film

KW - Thin film battery

UR - http://www.scopus.com/inward/record.url?scp=84890431036&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84890431036&partnerID=8YFLogxK

U2 - 10.1007/s10832-013-9845-5

DO - 10.1007/s10832-013-9845-5

M3 - Article

AN - SCOPUS:84890431036

VL - 31

SP - 316

EP - 323

JO - Journal of Electroceramics

JF - Journal of Electroceramics

SN - 1385-3449

IS - 3-4

ER -