Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates

Kwang Hwan Cho, Jong Yoon Ha, Chong-Yun Kang, Ji Won Choi, Young Pak Lee, Seok Jin Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The change in dielectric constant of ferroelectric materials as a function of electric field is the key to wide range of microwave application such as tunable filter, impedance matching network, and phase shifter, In this study, ferroelectric Ba0.5Sr0.5TiO3 (BST) films were grown on r-cut sapphire and polycrystalline sapphire (poly-sapphire) substrates by RF sputtering. The results of comprehensive structural diagnostics of the films are correlated with the dielectric constant and dielectric loss of a co-planar BST varactor, measured at a frequency range of 1-3 GHz. Textured BST films approximately 500 nm thick, grown on r-cut sapphire substrates, are characterized by high dielectric constant ≥ 650. However, polycrystalline BST films, grown on poly-sapphire substrates, are less strained, having dielectric constant range of 430-640.

Original languageEnglish
Title of host publicationDiffusion and Defect Data Pt.B: Solid State Phenomena
Pages1829-1832
Number of pages4
Volume124-126
EditionPART 2
Publication statusPublished - 2007 Dec 1
EventIUMRS International Conference in Asia 2006, IUMRS-ICA 2006 - Jeju, Korea, Republic of
Duration: 2006 Sep 102006 Sep 14

Publication series

NameDiffusion and Defect Data Pt.B: Solid State Phenomena
NumberPART 2
Volume124-126
ISSN (Print)10120394

Other

OtherIUMRS International Conference in Asia 2006, IUMRS-ICA 2006
CountryKorea, Republic of
CityJeju
Period06/9/1006/9/14

Fingerprint

Aluminum Oxide
Sapphire
sapphire
Permittivity
Microwaves
permittivity
microwaves
Substrates
Ferroelectric films
varactor diodes
Varactors
ferroelectric materials
impedance matching
tunable filters
Phase shifters
Dielectric losses
dielectric loss
Ferroelectric materials
Sputtering
sputtering

Keywords

  • BaSrTiO
  • Ferroelectric thin film
  • Tunable microwave device

ASJC Scopus subject areas

  • Materials Science(all)
  • Physics and Astronomy (miscellaneous)
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Cho, K. H., Ha, J. Y., Kang, C-Y., Choi, J. W., Lee, Y. P., & Yoon, S. J. (2007). Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates. In Diffusion and Defect Data Pt.B: Solid State Phenomena (PART 2 ed., Vol. 124-126, pp. 1829-1832). (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 124-126, No. PART 2).

Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates. / Cho, Kwang Hwan; Ha, Jong Yoon; Kang, Chong-Yun; Choi, Ji Won; Lee, Young Pak; Yoon, Seok Jin.

Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 124-126 PART 2. ed. 2007. p. 1829-1832 (Diffusion and Defect Data Pt.B: Solid State Phenomena; Vol. 124-126, No. PART 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cho, KH, Ha, JY, Kang, C-Y, Choi, JW, Lee, YP & Yoon, SJ 2007, Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates. in Diffusion and Defect Data Pt.B: Solid State Phenomena. PART 2 edn, vol. 124-126, Diffusion and Defect Data Pt.B: Solid State Phenomena, no. PART 2, vol. 124-126, pp. 1829-1832, IUMRS International Conference in Asia 2006, IUMRS-ICA 2006, Jeju, Korea, Republic of, 06/9/10.
Cho KH, Ha JY, Kang C-Y, Choi JW, Lee YP, Yoon SJ. Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates. In Diffusion and Defect Data Pt.B: Solid State Phenomena. PART 2 ed. Vol. 124-126. 2007. p. 1829-1832. (Diffusion and Defect Data Pt.B: Solid State Phenomena; PART 2).
Cho, Kwang Hwan ; Ha, Jong Yoon ; Kang, Chong-Yun ; Choi, Ji Won ; Lee, Young Pak ; Yoon, Seok Jin. / Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates. Diffusion and Defect Data Pt.B: Solid State Phenomena. Vol. 124-126 PART 2. ed. 2007. pp. 1829-1832 (Diffusion and Defect Data Pt.B: Solid State Phenomena; PART 2).
@inproceedings{9c69fc612fa04f588ea61159fa6ca5b1,
title = "Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates",
abstract = "The change in dielectric constant of ferroelectric materials as a function of electric field is the key to wide range of microwave application such as tunable filter, impedance matching network, and phase shifter, In this study, ferroelectric Ba0.5Sr0.5TiO3 (BST) films were grown on r-cut sapphire and polycrystalline sapphire (poly-sapphire) substrates by RF sputtering. The results of comprehensive structural diagnostics of the films are correlated with the dielectric constant and dielectric loss of a co-planar BST varactor, measured at a frequency range of 1-3 GHz. Textured BST films approximately 500 nm thick, grown on r-cut sapphire substrates, are characterized by high dielectric constant ≥ 650. However, polycrystalline BST films, grown on poly-sapphire substrates, are less strained, having dielectric constant range of 430-640.",
keywords = "BaSrTiO, Ferroelectric thin film, Tunable microwave device",
author = "Cho, {Kwang Hwan} and Ha, {Jong Yoon} and Chong-Yun Kang and Choi, {Ji Won} and Lee, {Young Pak} and Yoon, {Seok Jin}",
year = "2007",
month = "12",
day = "1",
language = "English",
isbn = "3908451310",
volume = "124-126",
series = "Diffusion and Defect Data Pt.B: Solid State Phenomena",
number = "PART 2",
pages = "1829--1832",
booktitle = "Diffusion and Defect Data Pt.B: Solid State Phenomena",
edition = "PART 2",

}

TY - GEN

T1 - Structural features and microwave properties of Ba0.5Sr 0.5TiO3 films grown on sapphire substrates

AU - Cho, Kwang Hwan

AU - Ha, Jong Yoon

AU - Kang, Chong-Yun

AU - Choi, Ji Won

AU - Lee, Young Pak

AU - Yoon, Seok Jin

PY - 2007/12/1

Y1 - 2007/12/1

N2 - The change in dielectric constant of ferroelectric materials as a function of electric field is the key to wide range of microwave application such as tunable filter, impedance matching network, and phase shifter, In this study, ferroelectric Ba0.5Sr0.5TiO3 (BST) films were grown on r-cut sapphire and polycrystalline sapphire (poly-sapphire) substrates by RF sputtering. The results of comprehensive structural diagnostics of the films are correlated with the dielectric constant and dielectric loss of a co-planar BST varactor, measured at a frequency range of 1-3 GHz. Textured BST films approximately 500 nm thick, grown on r-cut sapphire substrates, are characterized by high dielectric constant ≥ 650. However, polycrystalline BST films, grown on poly-sapphire substrates, are less strained, having dielectric constant range of 430-640.

AB - The change in dielectric constant of ferroelectric materials as a function of electric field is the key to wide range of microwave application such as tunable filter, impedance matching network, and phase shifter, In this study, ferroelectric Ba0.5Sr0.5TiO3 (BST) films were grown on r-cut sapphire and polycrystalline sapphire (poly-sapphire) substrates by RF sputtering. The results of comprehensive structural diagnostics of the films are correlated with the dielectric constant and dielectric loss of a co-planar BST varactor, measured at a frequency range of 1-3 GHz. Textured BST films approximately 500 nm thick, grown on r-cut sapphire substrates, are characterized by high dielectric constant ≥ 650. However, polycrystalline BST films, grown on poly-sapphire substrates, are less strained, having dielectric constant range of 430-640.

KW - BaSrTiO

KW - Ferroelectric thin film

KW - Tunable microwave device

UR - http://www.scopus.com/inward/record.url?scp=38549104661&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=38549104661&partnerID=8YFLogxK

M3 - Conference contribution

SN - 3908451310

SN - 9783908451310

VL - 124-126

T3 - Diffusion and Defect Data Pt.B: Solid State Phenomena

SP - 1829

EP - 1832

BT - Diffusion and Defect Data Pt.B: Solid State Phenomena

ER -