Structural, optical, and magnetic properties of Ag+, Mn+ and Ar+ ions implanted ZnO thin films: effect of implantation dose and stopping energy

Weon Cheol Lim, Jitendra Pal Singh, Jonghan Song, Tae Yeon Seong, Keun Hwa Chae

Research output: Contribution to journalArticlepeer-review

Abstract

Herein, we systematically studied the effect of various excitation processes on the structural, optical, and magnetic properties of ZnO films implanted with 80 keV Ar+, 110 keV Mn+, and 190 keV Ag+ ions. Four different doses of 1 × 1013, 1 × 1014, 1 × 1015, and 2 × 1016 ions per cm2 were used for implantation. It was observed that the structural, optical, and magnetic properties of the implanted samples were dominantly affected at the highest dose of 2 × 1016 ions per cm2. For lower doses, insignificant changes in these properties were observed. A comparison of various processes involved in the implantation process shows that both the electronic excitation and nuclear excitation processes are responsible for the changes in the structural, optical, and magnetic properties of the implanted ZnO films.

Original languageEnglish
Pages (from-to)29666-29676
Number of pages11
JournalRSC Advances
Volume12
Issue number46
DOIs
Publication statusPublished - 2022 Oct 18

ASJC Scopus subject areas

  • Chemistry(all)
  • Chemical Engineering(all)

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