Structural study of amorphous vanadium oxide films for thin film microbattery

Han Ki Kim, Tae Yeon Seong, Young Soo Yoon

Research output: Contribution to journalArticle

20 Citations (Scopus)
Original languageEnglish
Pages (from-to)754-759
Number of pages6
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number2
DOIs
Publication statusPublished - 2003 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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