Structure and tribological properties of plasma-treated carbide derived carbon layer

Eung Seok Lee, Yoon Soo Chun, Choong Hyun Lee, Dae-Soon Lim

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The effect of hydrogen plasma treatment on the nanocrystal structure and tribological properties of carbide derived carbon (CDC) was investigated. The CDC layer was formed on a SiC substrate using chlorine gas at 1000°C. The plasma treatment was performed on the CDC layer via plasma-enhanced chemical vapor deposition (PECVD) and plasma exposure times of 1, 3, 5, 10 and 15 h were used. Raman spectra and transmission electron microscopy measurements revealed that the carbon layer of the 5 h-treated CDC layer consisted of nanocrystal phases; prior to the treatment, the carbon layer was mainly composed of amorphous carbon structures. Furthermore, the effect of the plasma treatment on the tribological properties of the CDC layer was investigated. The optimum friction coefficient value of 0.09 and a slightly enhanced wear rate were obtained after the 5 h plasma treatment. These results showed that the plasma treatment transformed the carbon structure of the CDC and increased the amount of sp3-bonded nanocrystal structures. As a result, the tribological properties of the CDC layer were optimized by using the plasma treatment.

Original languageEnglish
Pages (from-to)1070-1076
Number of pages7
JournalCarbon
Volume96
DOIs
Publication statusPublished - 2016 Jan 1

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Carbides
Carbon
Plasmas
Nanocrystals
Chlorine
Amorphous carbon
Plasma enhanced chemical vapor deposition
Raman scattering
Hydrogen
Gases
Wear of materials
Friction
Transmission electron microscopy
Substrates

ASJC Scopus subject areas

  • Chemistry(all)

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Structure and tribological properties of plasma-treated carbide derived carbon layer. / Lee, Eung Seok; Chun, Yoon Soo; Lee, Choong Hyun; Lim, Dae-Soon.

In: Carbon, Vol. 96, 01.01.2016, p. 1070-1076.

Research output: Contribution to journalArticle

Lee, Eung Seok ; Chun, Yoon Soo ; Lee, Choong Hyun ; Lim, Dae-Soon. / Structure and tribological properties of plasma-treated carbide derived carbon layer. In: Carbon. 2016 ; Vol. 96. pp. 1070-1076.
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