Studies of porous silicon field emitters

E. Boswell, Tae Yeon Seong, P. R. Wilshaw

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Abstract

Recent work on field emitters has shown that a thin layer of porous silicon formed on the surface of pyramidal p-type silicon emitters can dramatically improve their emission characteristics, both in terms of the maximum emission current obtained and also the uniformity of emission between different pyramids [Wilshaw and Boswell, J. Vac. Sci. Technol. B 12, 662 (1994)]. A transmission electron microscope (TEM) study of the emitting surface of such pyramids is presented which shows that they are covered with a high density of surface asperities. TEM studies and electrical characterization are presented for two contrasting porous silicon morphologies.

Original languageEnglish
Pages (from-to)437-440
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume13
Issue number2
DOIs
Publication statusPublished - 1995 Mar 1
Externally publishedYes

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ASJC Scopus subject areas

  • Engineering(all)

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