Recent work on field emitters has shown that a thin layer of porous silicon formed on the surface of pyramidal p-type silicon emitters can dramatically improve their emission characteristics, both in terms of the maximum emission current obtained and also the uniformity of emission between different pyramids [Wilshaw and Boswell, J. Vac. Sci. Technol. B 12, 662 (1994)]. A transmission electron microscope (TEM) study of the emitting surface of such pyramids is presented which shows that they are covered with a high density of surface asperities. TEM studies and electrical characterization are presented for two contrasting porous silicon morphologies.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 1995 Mar 1|
ASJC Scopus subject areas