Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect

Ji Yeon Hyun; Se Jin Park; Soohyun Bae; Hyunjung Park; Dongkyun Kang; Seung Hoon Lee; Haeseok Lee; Yoon Mook Kang; Donghwan Kim

doi:10.1109/PVSC.2018.8547267

Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect

Ji Yeon Hyun, Se Jin Park, Soohyun Bae, Hyunjung Park, Dongkyun Kang, Seung Hoon Lee, Haeseok Lee, Yoon Mook Kang, Donghwan Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Al2 O3/SiNX passivation stacks have been widely adopted for high-efficiency silicon solar cells. We explored the effects of annealing step procedure and annealing temperature. It was shown that high iVoc were achieved when post annealing treatment performed than pre annealing. The reason for this result was analyzed by ATP images and SIMS profile. Post annealing treatment showed that hydrogen of SiNx migrates to between the silicon surface and Al2O3

Original language	English
Title of host publication	2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	3102-3104
Number of pages	3
ISBN (Electronic)	9781538685297
DOIs	https://doi.org/10.1109/PVSC.2018.8547267
Publication status	Published - 2018 Nov 26
Event	7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - Waikoloa Village, United States Duration: 2018 Jun 10 → 2018 Jun 15

Other

Other	7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018
Country/Territory	United States
City	Waikoloa Village
Period	18/6/10 → 18/6/15

ASJC Scopus subject areas

Energy Engineering and Power Technology
Renewable Energy, Sustainability and the Environment
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/PVSC.2018.8547267

Cite this

Hyun, J. Y., Park, S. J., Bae, S., Park, H., Kang, D., Lee, S. H., Lee, H., Kang, Y. M., & Kim, D. (2018). Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect. In 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC (pp. 3102-3104). [8547267] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2018.8547267

Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect. / Hyun, Ji Yeon; Park, Se Jin; Bae, Soohyun et al.

2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC. Institute of Electrical and Electronics Engineers Inc., 2018. p. 3102-3104 8547267.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hyun, JY, Park, SJ, Bae, S, Park, H, Kang, D, Lee, SH, Lee, H, Kang, YM & Kim, D 2018, Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect. in 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC., 8547267, Institute of Electrical and Electronics Engineers Inc., pp. 3102-3104, 7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018, Waikoloa Village, United States, 18/6/10. https://doi.org/10.1109/PVSC.2018.8547267

Hyun JY, Park SJ, Bae S, Park H, Kang D, Lee SH et al. Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect. In 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC. Institute of Electrical and Electronics Engineers Inc. 2018. p. 3102-3104. 8547267 doi: 10.1109/PVSC.2018.8547267

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title = "Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect",

abstract = "Al2 O3/SiNX passivation stacks have been widely adopted for high-efficiency silicon solar cells. We explored the effects of annealing step procedure and annealing temperature. It was shown that high iVoc were achieved when post annealing treatment performed than pre annealing. The reason for this result was analyzed by ATP images and SIMS profile. Post annealing treatment showed that hydrogen of SiNx migrates to between the silicon surface and Al2O3",

author = "Hyun, {Ji Yeon} and Park, {Se Jin} and Soohyun Bae and Hyunjung Park and Dongkyun Kang and Lee, {Seung Hoon} and Haeseok Lee and Kang, {Yoon Mook} and Donghwan Kim",

year = "2018",

month = nov,

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doi = "10.1109/PVSC.2018.8547267",

language = "English",

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booktitle = "2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC",

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note = "7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018 ; Conference date: 10-06-2018 Through 15-06-2018",

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AU - Kang, Dongkyun

AU - Lee, Seung Hoon

AU - Lee, Haeseok

AU - Kang, Yoon Mook

AU - Kim, Donghwan

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N2 - Al2 O3/SiNX passivation stacks have been widely adopted for high-efficiency silicon solar cells. We explored the effects of annealing step procedure and annealing temperature. It was shown that high iVoc were achieved when post annealing treatment performed than pre annealing. The reason for this result was analyzed by ATP images and SIMS profile. Post annealing treatment showed that hydrogen of SiNx migrates to between the silicon surface and Al2O3

AB - Al2 O3/SiNX passivation stacks have been widely adopted for high-efficiency silicon solar cells. We explored the effects of annealing step procedure and annealing temperature. It was shown that high iVoc were achieved when post annealing treatment performed than pre annealing. The reason for this result was analyzed by ATP images and SIMS profile. Post annealing treatment showed that hydrogen of SiNx migrates to between the silicon surface and Al2O3

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BT - 2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC

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Y2 - 10 June 2018 through 15 June 2018

ER -

Study on hydrogen passivation behavior of SiNx film and its thermal annealing effect

Abstract

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ASJC Scopus subject areas

UN SDGs

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