Study on modified silicon surface after CHF3/C2F6 reactive ion etching

Hyung Ho Park, Kwang Ho Kwon, Sang Hwan Lee, Byung Hwa Koak, Sahn Nahm, Hee Tae Lee, Kyoung Ik Cho, Oh Joon Kwon, Young II Kang

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14 Citations (Scopus)


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Engineering & Materials Science

Chemical Compounds