Study on the compositions of photosensitive Ag paste for patterning embedded fine-line inductor in LTCC

Sang Myoung Lee, Seong Dae Park, Myong Jae Yoo, Woo Sung Lee, Nam Kee Kang, Sahn Nahm

Research output: Contribution to journalArticle

Abstract

Line width under 100 μm with good resolution is difficult to achieve using conventional thick-film process utilizing screen printing method. However, combined with lithography technology finer line and space for miniaturization and highly integrated package is achievable. In this study, photosensitive Ag paste of optimum formulation used for thick film lithography technology was fabricated by various Ag powder, glass powder and additives. As the result, line width of 30 μm with good definition and reduced mismatch during co-firing with LTCC substrate was acquired. Formulated Ag paste was used to pattern embedded fine line inductor with over 90% yield.

Original languageEnglish
Pages (from-to)157-161
Number of pages5
JournalJournal of the Korean Ceramic Society
Volume44
Issue number3
DOIs
Publication statusPublished - 2007 Mar

Keywords

  • Ag paste
  • Embedded inductor
  • LTCC
  • Thick film lithography

ASJC Scopus subject areas

  • Ceramics and Composites

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