Sub-100nm hybrid stamp fabrication by hot embossing

Sung Hoon Hong, Kiyeon Yang, Heon Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

The fabrication of nano-structured materials using nanoimprint lithography has become more prevalent in recent years, due to its cost effectiveness and readiness. However, One of the biggest drawback of this technique is the fabrication of the imprinting stamp, which is expensive and difficult to fabricate. This paper describes a method of replication original Si or quartz made imprinting template into a polymer stamp which has many advantages, such as the simplicity and low cost of the fabrication process and the flexibility of the resulting stamp. Using the hot embossing method, PVC based imprint stamp with sub 100nm patterns can be fabricated. Due to its high UV transmittance, reasonable mechanical hardness and low surface energy, PVC based nanosized template can be used as a stamp for UV-NIL and sub lOOnm patterns were successfully transferred by the UV-NIL process with PVC based imprint stamp.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages462-465
Number of pages4
Volume510-511
Publication statusPublished - 2006 Dec 1
Event7th International Symposium on Eco-Materials Processing and Design, ISEPD-7 - Chengdu, China
Duration: 2006 Jan 82006 Jan 11

Publication series

NameMaterials Science Forum
Volume510-511
ISSN (Print)02555476

Other

Other7th International Symposium on Eco-Materials Processing and Design, ISEPD-7
CountryChina
CityChengdu
Period06/1/806/1/11

Fingerprint

Polyvinyl Chloride
Polyvinyl chlorides
Fabrication
Nanoimprint lithography
Quartz
Cost effectiveness
Interfacial energy
Nanostructured materials
Polymers
Hardness
Costs

Keywords

  • Flexible
  • Hot embossing
  • Nanoimprint lithography
  • PVC
  • Stamp
  • UV-NIL

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Hong, S. H., Yang, K., & Lee, H. (2006). Sub-100nm hybrid stamp fabrication by hot embossing. In Materials Science Forum (Vol. 510-511, pp. 462-465). (Materials Science Forum; Vol. 510-511).

Sub-100nm hybrid stamp fabrication by hot embossing. / Hong, Sung Hoon; Yang, Kiyeon; Lee, Heon.

Materials Science Forum. Vol. 510-511 2006. p. 462-465 (Materials Science Forum; Vol. 510-511).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Hong, SH, Yang, K & Lee, H 2006, Sub-100nm hybrid stamp fabrication by hot embossing. in Materials Science Forum. vol. 510-511, Materials Science Forum, vol. 510-511, pp. 462-465, 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7, Chengdu, China, 06/1/8.
Hong SH, Yang K, Lee H. Sub-100nm hybrid stamp fabrication by hot embossing. In Materials Science Forum. Vol. 510-511. 2006. p. 462-465. (Materials Science Forum).
Hong, Sung Hoon ; Yang, Kiyeon ; Lee, Heon. / Sub-100nm hybrid stamp fabrication by hot embossing. Materials Science Forum. Vol. 510-511 2006. pp. 462-465 (Materials Science Forum).
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