Sub-100nm hybrid stamp fabrication by hot embossing

Sung Hoon Hong, Kiyeon Yang, Heon Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

The fabrication of nano-structured materials using nanoimprint lithography has become more prevalent in recent years, due to its cost effectiveness and readiness. However, One of the biggest drawback of this technique is the fabrication of the imprinting stamp, which is expensive and difficult to fabricate. This paper describes a method of replication original Si or quartz made imprinting template into a polymer stamp which has many advantages, such as the simplicity and low cost of the fabrication process and the flexibility of the resulting stamp. Using the hot embossing method, PVC based imprint stamp with sub 100nm patterns can be fabricated. Due to its high UV transmittance, reasonable mechanical hardness and low surface energy, PVC based nanosized template can be used as a stamp for UV-NIL and sub lOOnm patterns were successfully transferred by the UV-NIL process with PVC based imprint stamp.

Original languageEnglish
Title of host publicationEco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7
PublisherTrans Tech Publications Ltd
Pages462-465
Number of pages4
ISBN (Print)0878499954, 9780878499953
DOIs
Publication statusPublished - 2006
Event7th International Symposium on Eco-Materials Processing and Design, ISEPD-7 - Chengdu, China
Duration: 2006 Jan 82006 Jan 11

Publication series

NameMaterials Science Forum
Volume510-511
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other7th International Symposium on Eco-Materials Processing and Design, ISEPD-7
CountryChina
CityChengdu
Period06/1/806/1/11

Keywords

  • Flexible
  • Hot embossing
  • Nanoimprint lithography
  • PVC
  • Stamp
  • UV-NIL

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Hong, S. H., Yang, K., & Lee, H. (2006). Sub-100nm hybrid stamp fabrication by hot embossing. In Eco-Materials Processing and Design VII - Proceedings of the Conference of the 7th International Symposium on Eco-Materials Processing and Design, ISEPD-7 (pp. 462-465). (Materials Science Forum; Vol. 510-511). Trans Tech Publications Ltd. https://doi.org/10.4028/0-87849-995-4.462