Surface acoustic wave sensors to detect volatile gases by measuring output phase shift

Beom Keun Yoo, Yong Wook Park, Chong Yun Kang, Seok Jin Yoon, Jin Sang Kim

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

This paper presents properties of saw acoustic wave (SAW) gas sensors to detect volatile gases such as acetone, methanol, and ethanol by measuring phase shift. A dual-delay-line saw sensors with a center frequency of 100 MHz were fabricated on 128° Y-Z LiNbO 3 piezoelectric substrate. In order to improve sensitivity of SAW sensors, a thin titanium (Ti) film as mass sensitive layer was deposited using e-beam evaporation on the surface of the SAW sensors. In our investigation the response time and sensitivity of SAW sensors were measured. The response time and sensitivity of SAW sensor with thin Ti film were strongly improved because of changing electrical and mechanical properties in the mass sensitive layer. As a result, high sensitivity and fast response time could be achieved by deposition of thin Ti film as mass sensitive layer on the surface of SAW sensor. It can be applied for high performance electronic nose system by assembling an array of different sensors.

Original languageEnglish
Pages (from-to)1013-1017
Number of pages5
JournalJournal of Electroceramics
Volume17
Issue number2-4
DOIs
Publication statusPublished - 2006 Dec 1
Externally publishedYes

Fingerprint

Phase shift
Surface waves
phase shift
Gases
Acoustic waves
acoustics
output
sensors
Sensors
gases
Titanium
titanium
sensitivity
Electric delay lines
Acetone
Chemical sensors
delay lines
assembling
Methanol
Evaporation

Keywords

  • Gas sensor
  • Phase shift
  • SAW
  • Sensitive layer

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Surface acoustic wave sensors to detect volatile gases by measuring output phase shift. / Yoo, Beom Keun; Park, Yong Wook; Kang, Chong Yun; Yoon, Seok Jin; Kim, Jin Sang.

In: Journal of Electroceramics, Vol. 17, No. 2-4, 01.12.2006, p. 1013-1017.

Research output: Contribution to journalArticle

Yoo, Beom Keun ; Park, Yong Wook ; Kang, Chong Yun ; Yoon, Seok Jin ; Kim, Jin Sang. / Surface acoustic wave sensors to detect volatile gases by measuring output phase shift. In: Journal of Electroceramics. 2006 ; Vol. 17, No. 2-4. pp. 1013-1017.
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