Surface modification of α-Al2O3(0001) by N2 + ion irradiation

Won Kook Choi, Sung Chang Choi, Hyung Jin Jung, Seok Keun Koh, Dong Jin Byun, Dong Wha Kum

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The surface of sapphire most widely used as a substrate for III-V nitride growth was modified by N2 + ion irradiation with ion-beam energies from 100 to 1000 eV. As the ion-beam energy increased from 100 to 500 eV, the root-mean-square roughness of the surface morphology decreased. However no significant change in surface roughness at energy higher than 500 eV was observed. From the N 1s x-ray photoelectron spectroscopy core-level spectra, no peak related to a nitrogen bond could be found in the samples irradiated with ion energy below 500 eV. An AlON peak began to appear in the samples irradiated with 600-900 eV N2 + ions, and two peaks corresponding to AlON and AlN were distinctively observed in the sample irradiated at 1 keV.

Original languageEnglish
Pages (from-to)3311-3313
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume16
Issue number6
Publication statusPublished - 1998 Nov 1

Fingerprint

Ion bombardment
ion irradiation
Ion beams
Surface treatment
Surface roughness
Ions
Core levels
Aluminum Oxide
Photoelectron spectroscopy
Sapphire
Nitrides
Surface morphology
Nitrogen
ion beams
X rays
energy
Substrates
x ray spectroscopy
nitrides
surface roughness

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Physics and Astronomy (miscellaneous)
  • Surfaces and Interfaces

Cite this

Surface modification of α-Al2O3(0001) by N2 + ion irradiation. / Choi, Won Kook; Choi, Sung Chang; Jung, Hyung Jin; Koh, Seok Keun; Byun, Dong Jin; Kum, Dong Wha.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 16, No. 6, 01.11.1998, p. 3311-3313.

Research output: Contribution to journalArticle

Choi, Won Kook ; Choi, Sung Chang ; Jung, Hyung Jin ; Koh, Seok Keun ; Byun, Dong Jin ; Kum, Dong Wha. / Surface modification of α-Al2O3(0001) by N2 + ion irradiation. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 1998 ; Vol. 16, No. 6. pp. 3311-3313.
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