Surface Passivation of Germanium Using SF6 Plasma to Reduce Source/Drain Contact Resistance in Germanium n-FET

Gwang Sik Kim, Seung Hwan Kim, Jeong Kyu Kim, Changhwan Shin, Jin Hong Park, Krishna C. Saraswat, Byung Jin Cho, Hyun Yong Yu

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds