Surface texturing of GaAs using a nanosphere lithography technique for solar cell applications

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

In this study, we present novel methods to texture the surface of GaAs substrates using the nanosphere lithography (NSL) technique that is based on arrays of SiO2 nanospheres. Closed-packed arrays of SiO2 nanospheres were formed on a benzocyclobutene (BCB) layer, followed by embedding SiO2 nanospheres into the BCB layer. To texture the GaAs surface, three patterns were fabricated by nanosphere lithography. First, a convex pattern from the shape of the nanospheres was produced on the surface of GaAs. Second, a concave shape was produced on the surface of GaAs by additional wet etching to remove SiO2 nanospheres. These two methods were found to be effective in reducing the reflectance to a range of 400-800 nm. Finally, the arrays of SiO2 nanospheres were transferred onto the GaAs by dry-etching using a mixture of Cl2 and BCl3 gases, resulting in arrays of GaAs nanorods. The dry-etched surface structure showed the lowest reflectance.

Original languageEnglish
Pages (from-to)6583-6586
Number of pages4
JournalThin Solid Films
Volume518
Issue number22
DOIs
Publication statusPublished - 2010 Sep 1

Fingerprint

Texturing
Nanospheres
Lithography
Solar cells
lithography
solar cells
textures
etching
reflectance
Textures
embedding
nanorods
Dry etching
gallium arsenide
Wet etching
Nanorods
Surface structure
gases
Gases
Substrates

Keywords

  • Anti-reflection
  • Solar cells
  • Surface texturing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

Surface texturing of GaAs using a nanosphere lithography technique for solar cell applications. / Kim, B.; Bang, Joona; Jang, S.; Kim, Donghwan; Kim, Ji Hyun.

In: Thin Solid Films, Vol. 518, No. 22, 01.09.2010, p. 6583-6586.

Research output: Contribution to journalArticle

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