Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition

Cheol Jin Lee, Dae Woon Kim, Tae Jae Lee, Young Chul Choi, Young Soo Park, Won Seok Kim, Young Hee Lee, Won Bong Choi, Nae Sung Lee, Jong Min Kim, Yong Gak Choi, Soo Chang Yu

Research output: Contribution to journalArticle

132 Citations (Scopus)

Abstract

We have synthesized carbon nanotubes by thermal chemical vapor deposition of C2H2 on transition metal-coated silicon substrates. Multiwalled carbon nanotubes are uniformly synthesized on a large area of the plain Si substrates, different from previously reported porous Si substrates. It is observed that surface modification of transition metals deposited on substrates by either etching with dipping in a HF solution and/or NH3 pretreatment is a crucial step for the nanotube growth prior to the reaction of C2H2 gas. We will demonstrate that the diameters of carbon nanotubes can be controlled by applying the different transition metals.

Original languageEnglish
Pages (from-to)1721-1723
Number of pages3
JournalApplied Physics Letters
Volume75
Issue number12
Publication statusPublished - 1999 Sep 20
Externally publishedYes

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carbon nanotubes
vapor deposition
transition metals
synthesis
dipping
plains
pretreatment
nanotubes
etching
silicon
gases

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Lee, C. J., Kim, D. W., Lee, T. J., Choi, Y. C., Park, Y. S., Kim, W. S., ... Yu, S. C. (1999). Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition. Applied Physics Letters, 75(12), 1721-1723.

Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition. / Lee, Cheol Jin; Kim, Dae Woon; Lee, Tae Jae; Choi, Young Chul; Park, Young Soo; Kim, Won Seok; Lee, Young Hee; Choi, Won Bong; Lee, Nae Sung; Kim, Jong Min; Choi, Yong Gak; Yu, Soo Chang.

In: Applied Physics Letters, Vol. 75, No. 12, 20.09.1999, p. 1721-1723.

Research output: Contribution to journalArticle

Lee, CJ, Kim, DW, Lee, TJ, Choi, YC, Park, YS, Kim, WS, Lee, YH, Choi, WB, Lee, NS, Kim, JM, Choi, YG & Yu, SC 1999, 'Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition', Applied Physics Letters, vol. 75, no. 12, pp. 1721-1723.
Lee, Cheol Jin ; Kim, Dae Woon ; Lee, Tae Jae ; Choi, Young Chul ; Park, Young Soo ; Kim, Won Seok ; Lee, Young Hee ; Choi, Won Bong ; Lee, Nae Sung ; Kim, Jong Min ; Choi, Yong Gak ; Yu, Soo Chang. / Synthesis of uniformly distributed carbon nanotubes on a large area of Si substrates by thermal chemical vapor deposition. In: Applied Physics Letters. 1999 ; Vol. 75, No. 12. pp. 1721-1723.
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