Tailored Graphene Micropatterns by Wafer-Scale Direct Transfer for Flexible Chemical Sensor Platform

Yeonhoo Kim, Taehoon Kim, Jinwoo Lee, Yong Seok Choi, Joonhee Moon, Seo Yun Park, Tae Hyung Lee, Hoon Kee Park, Sol A. Lee, Min Sang Kwon, Hyung Gi Byun, Jong Heun Lee, Myoung Gyu Lee, Byung Hee Hong, Ho Won Jang

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

Abstract

2D materials, such as graphene, exhibit great potential as functional materials for numerous novel applications due to their excellent properties. The grafting of conventional micropatterning techniques on new types of electronic devices is required to fully utilize the unique nature of graphene. However, the conventional lithography and polymer-supported transfer methods often induce the contamination and damage of the graphene surface due to polymer residues and harsh wet-transfer conditions. Herein, a novel strategy to obtain micropatterned graphene on polymer substrates using a direct curing process is demonstrated. Employing this method, entirely flexible, transparent, well-defined self-activated graphene sensor arrays, capable of gas discrimination without external heating, are fabricated on 4 in. wafer-scale substrates. Finite element method simulations show the potential of this patterning technique to maximize the performance of the sensor devices when the active channels of the 2D material are suspended and nanoscaled. This study contributes considerably to the development of flexible functional electronic devices based on 2D materials.

Original languageEnglish
Article number2004827
JournalAdvanced Materials
Volume33
Issue number2
DOIs
Publication statusPublished - 2021 Jan 14

Keywords

  • 2D materials
  • chemical sensor arrays
  • finite element simulations
  • graphene
  • microscale patterning

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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