Technology development of silicon based CMOS tactile senor for robotics applications

Yong Kook Kim, Kunnyun Kim, Kang Ryeol Lee, Woo Sung Cho, Dae Sung Lee, Won Hyo Kim, Nam Kyu Cho, Kwang Bum Park, Hyo Derk Park, Jung ho Park, Byeong Kwon Ju

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper describes the design, manufacture and measure of tactile sensor with piezoresistive detection of deflection. The tactile sensor array was constructed with a fully integrated complementary metal oxide semiconductor (CMOS) fabrication process and bulk micromachining for the sensing structures. Electrical connections were made between the flexible printed circuit boards (FPCB) and the sensor array module using an anisotropic conductive film (ACF) bonding. The individual sensor element has been shown to demonstrate linear responses to applied normal stress (117mV/N). Therefore, this approach could yield a highly sensitive tactile sensor array for use in dexterous robotic applications.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
Pages734-737
Number of pages4
DOIs
Publication statusPublished - 2006 Dec 1
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 2006 Oct 222006 Oct 25

Other

Other2006 5th IEEE Conference on Sensors
CountryKorea, Republic of
CityDaegu
Period06/10/2206/10/25

Fingerprint

Sensor arrays
Robotics
Silicon
Metals
Conductive films
Sensors
Micromachining
Printed circuit boards
Fabrication
Oxide semiconductors

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Kim, Y. K., Kim, K., Lee, K. R., Cho, W. S., Lee, D. S., Kim, W. H., ... Ju, B. K. (2006). Technology development of silicon based CMOS tactile senor for robotics applications. In Proceedings of IEEE Sensors (pp. 734-737). [4178725] https://doi.org/10.1109/ICSENS.2007.355573

Technology development of silicon based CMOS tactile senor for robotics applications. / Kim, Yong Kook; Kim, Kunnyun; Lee, Kang Ryeol; Cho, Woo Sung; Lee, Dae Sung; Kim, Won Hyo; Cho, Nam Kyu; Park, Kwang Bum; Park, Hyo Derk; Park, Jung ho; Ju, Byeong Kwon.

Proceedings of IEEE Sensors. 2006. p. 734-737 4178725.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, YK, Kim, K, Lee, KR, Cho, WS, Lee, DS, Kim, WH, Cho, NK, Park, KB, Park, HD, Park, JH & Ju, BK 2006, Technology development of silicon based CMOS tactile senor for robotics applications. in Proceedings of IEEE Sensors., 4178725, pp. 734-737, 2006 5th IEEE Conference on Sensors, Daegu, Korea, Republic of, 06/10/22. https://doi.org/10.1109/ICSENS.2007.355573
Kim YK, Kim K, Lee KR, Cho WS, Lee DS, Kim WH et al. Technology development of silicon based CMOS tactile senor for robotics applications. In Proceedings of IEEE Sensors. 2006. p. 734-737. 4178725 https://doi.org/10.1109/ICSENS.2007.355573
Kim, Yong Kook ; Kim, Kunnyun ; Lee, Kang Ryeol ; Cho, Woo Sung ; Lee, Dae Sung ; Kim, Won Hyo ; Cho, Nam Kyu ; Park, Kwang Bum ; Park, Hyo Derk ; Park, Jung ho ; Ju, Byeong Kwon. / Technology development of silicon based CMOS tactile senor for robotics applications. Proceedings of IEEE Sensors. 2006. pp. 734-737
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