Temperature effect on the growth of carbon nanotubes using thermal chemical vapor deposition

Cheol Jin Lee, Jeunghee Park, Yoon Huh, Jeong Yong Lee

Research output: Contribution to journalArticle

238 Citations (Scopus)

Abstract

Vertically aligned carbon nanotubes (CNTs) are grown on iron-deposited silicon oxide substrates by thermal chemical vapor deposition (CVD) of acetylene gas at the temperature range 750-950°C. As the growth temperature increases from 750°C to 950°C, the growth rate increases by four times and the average diameter also increases from 30 nm to 130 nm while the density decreases by a factor of about two. The relative amount of crystalline graphitic sheets increases progressively with the growth temperature and a higher degree of crystalline perfection can be achieved at 950°C. This result demonstrates that the growth rate, diameter, density, and crystallinity of CNT can be controlled with the growth temperature.

Original languageEnglish
Pages (from-to)33-38
Number of pages6
JournalChemical Physics Letters
Volume343
Issue number1-2
DOIs
Publication statusPublished - 2001 Jul 27
Externally publishedYes

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ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Spectroscopy
  • Atomic and Molecular Physics, and Optics

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