Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film

J. H. Park, H. Y. Bae, Y. R. Oh, Yun-Jae Kim, H. Y. Kim, Y. H. Huh

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 μm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non-contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (charge-coupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 μm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 μm width were 72.8 ± 3.7, 75.0 ± 1.3, 73.3 ± 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 μm width were 263.4 ± 21.1, 238.6 ± 4.5, 221.1 ± 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 μm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2% offset yield strength could not be measured because the PZT/Pt thin film is very brittle.

Original languageEnglish
Pages (from-to)478-484
Number of pages7
JournalMaterialwissenschaft und Werkstofftechnik
Volume42
Issue number5
DOIs
Publication statusPublished - 2011 May 1

Fingerprint

tensile tests
Platinum
platinum
Tensile strength
Thin films
tensile strength
thin films
test equipment
Elastic moduli
modulus of elasticity
Charge coupled devices
Delamination
Gages
Yield stress
Capacitance
yield strength
lead titanate zirconate
charge coupled devices
capacitance
Air

Keywords

  • dünne Blei-Zirkonat-Titanat (PZT) Schicht
  • dünne Schicht
  • elastischer Modul
  • Mikrozugversuch
  • Platin (Pt)
  • Zugfestigkeit

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film. / Park, J. H.; Bae, H. Y.; Oh, Y. R.; Kim, Yun-Jae; Kim, H. Y.; Huh, Y. H.

In: Materialwissenschaft und Werkstofftechnik, Vol. 42, No. 5, 01.05.2011, p. 478-484.

Research output: Contribution to journalArticle

Park, J. H. ; Bae, H. Y. ; Oh, Y. R. ; Kim, Yun-Jae ; Kim, H. Y. ; Huh, Y. H. / Tensile test of lead zirconate titanate (PZT)/Platinum (Pt) thin film. In: Materialwissenschaft und Werkstofftechnik. 2011 ; Vol. 42, No. 5. pp. 478-484.
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AU - Bae, H. Y.

AU - Oh, Y. R.

AU - Kim, Yun-Jae

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AU - Huh, Y. H.

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N2 - This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 μm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non-contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (charge-coupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 μm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 μm width were 72.8 ± 3.7, 75.0 ± 1.3, 73.3 ± 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 μm width were 263.4 ± 21.1, 238.6 ± 4.5, 221.1 ± 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 μm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2% offset yield strength could not be measured because the PZT/Pt thin film is very brittle.

AB - This paper presents the results of tensile tests for lead zirconate titanate (PZT)/Platinum (Pt) thin films of 2.15 μm thickness in atmospheric air at room temperature. An axial loading tester developed by the authors was used for the tests. The tester was equipped with a load cell with a maximum capacity of 0.5 N and a non-contact position measuring system based on the principle of capacitance micrometry. Furthermore, the tester was equipped with a CCD (charge-coupled device) system for measuring the displacement of the gage length. Specimens with three different widths (50, 100 and 150 μm) were fabricated to study the size (width of specimen) effects. The elastic moduli of the specimens with 50, 100 and 150 μm width were 72.8 ± 3.7, 75.0 ± 1.3, 73.3 ± 1.8 GPa, respectively. In addition, the ultimate tensile strength of the specimens with 50, 100 and 150 μm width were 263.4 ± 21.1, 238.6 ± 4.5, 221.1 ± 13.9 MPa, respectively. It was observed that the width of specimen has little effect on the elastic modulus of PZT/Pt thin films but has an effect on the ultimate tensile strength of PZT/Pt thin films and the ultimate tensile strength decreases as the width increases. It was assumed that the scatter in the ultimate tensile strength of 50 μm width was attributed to delamination of PZT/Pt layers before the fracture in the tensile test. The 0.2% offset yield strength could not be measured because the PZT/Pt thin film is very brittle.

KW - dünne Blei-Zirkonat-Titanat (PZT) Schicht

KW - dünne Schicht

KW - elastischer Modul

KW - Mikrozugversuch

KW - Platin (Pt)

KW - Zugfestigkeit

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