Textured Pb(Zr,Ti)O3-Pb[(Zn,Ni)1/3Nb2/3]O3 multilayer ceramics and their application to piezoelectric actuators

Eun Ji Kim, Tae Gon Lee, Dae Su Kim, Sun Woo Kim, Yeon Jeong Yee, Seung Ho Han, Hyung Won Kang, Sahn Nahm

Research output: Contribution to journalArticle

Abstract

0.69Pb(Zr0.47Ti0.53)-0.31Pb[(Zn0.4Ni0.6)1/3Nb2/3]O3 (PZT-PZNN) thick films were textured at 950°C along the [001] direction using BaTiO3 (BT) platelets. The 80Ag/20Pd electrodes coated on the PZT-PZNN thick films considerably assisted the texturing of the thick film. PZT-PZNN thick films with 5 vol% BT seeds exhibited a large strain (0.33% at 4.0 kV/mm) and d33* (1,040 pm/V at 1.5 kV/mm). Because the variations in d33* and strain of the PZT-PZNN thick films were not explained by Rayleigh's law, the experimental formula, which fits the measured d33* and strain, was suggested. Multilayer ceramics (MLCs) comprising five layers of textured PZT-PZNN thick films were fabricated at 950°C. Cantilever-type actuators produced by textured PZT-PZNN MLCs exhibited a large acceleration (46.9 G) and displacement (10.5 mm) at 50 V, which were much larger than those (32.6 G and 7 mm) of the actuators produced by untextured MLCs. Therefore, textured piezoelectric thick film can considerably improve the actuating properties of piezoelectric actuators.

Original languageEnglish
Article number100695
JournalApplied Materials Today
Volume20
DOIs
Publication statusPublished - 2020 Sep

Keywords

  • Actuator
  • Low temperature sintering
  • Multilayer
  • Strain equation
  • Textured piezoelectric ceramic

ASJC Scopus subject areas

  • Materials Science(all)

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