The analysis of oxygen plasma pretreatment for improving anodic bonding

Seung Woo Choi, Woo Beom Choi, Yun-Hi Lee, Byeong Kwon Ju, Man Young Sung, Byong Ho Kim

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

The oxygen plasma surface treatment of silicon and glass was studied for improving the characteristics of anodic bonding. By contact-angle measurements, we calculated the surface energy which is the sum of polar and dispersion components. The results showed that oxygen-plasma-induced distinctive high-polar and low-dispersion characteristics and caused the total surface energy to increase even at low power or short plasma exposure times for both silicon and glass surfaces. The highly polar-component-induced surface was maintained for over 100 days. On increasing plasma power and exposure time, it was observed that surface roughness increased. The oxygen plasma treatment was significantly efficient to reduce the contaminants on the surface, which was the main factor in degrading bonding strength and electrical properties of the interface. In the tensile test, the oxygen plasma treatment led to higher bonding strength than a conventional anodic bonding method.

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume149
Issue number1
DOIs
Publication statusPublished - 2002 Jan 1

Fingerprint

oxygen plasma
pretreatment
Oxygen
Plasmas
surface energy
Silicon
Interfacial energy
glass
silicon
tensile tests
surface treatment
contaminants
Glass
surface roughness
electrical properties
Angle measurement
Contact angle
Surface treatment
Electric properties
Surface roughness

ASJC Scopus subject areas

  • Electrochemistry
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

The analysis of oxygen plasma pretreatment for improving anodic bonding. / Choi, Seung Woo; Choi, Woo Beom; Lee, Yun-Hi; Ju, Byeong Kwon; Sung, Man Young; Kim, Byong Ho.

In: Journal of the Electrochemical Society, Vol. 149, No. 1, 01.01.2002.

Research output: Contribution to journalArticle

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